Makoto Nomura

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of controlling substrate processing apparatus, maintenance m...
- Patent number 8,972,036
- Issue date Mar 3, 2015
- Hitachi Kokusai Electric Inc.
- Makoto Nomura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 8,904,955
- Issue date Dec 9, 2014
- Hitachi Kokusai Electric, Inc.
- Makoto Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,588,950
- Issue date Nov 19, 2013
- Hitachi Kokusai Electric Inc.
- Makoto Nomura
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MANUFACTURING...
- Publication number 20240006206
- Publication date Jan 4, 2024
- Kokusai Electric Corporation
- Masako Sueyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230093324
- Publication date Mar 23, 2023
- Kokusai Electric Corporation
- Keita OKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, A NON-TRANSITORY COMPUTER-READABLE...
- Publication number 20200216961
- Publication date Jul 9, 2020
- Kokusai Electric Corporation
- Makoto NOMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20170011974
- Publication date Jan 12, 2017
- Hitachi Kokusai Electric Inc.
- Takashi YOKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CONTROLLING SUBSTRATE PROCESSING APPARATUS, MAINTENANCE M...
- Publication number 20140046470
- Publication date Feb 13, 2014
- Hitachi Kokusai Electric Inc.
- Makoto NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110218659
- Publication date Sep 8, 2011
- Hitachi Kokusai Electric Inc.
- Makoto NOMURA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090229634
- Publication date Sep 17, 2009
- Makoto Nomura
- H01 - BASIC ELECTRIC ELEMENTS

Makoto Nomura

Person

Patents Grantslast 30 patents

Method of controlling substrate processing apparatus, maintenance m...

Substrate processing apparatus

Substrate processing apparatus

Patents Applicationslast 30 patents

PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MANUFACTURING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, A NON-TRANSITORY COMPUTER-READABLE...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

METHOD OF CONTROLLING SUBSTRATE PROCESSING APPARATUS, MAINTENANCE M...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS