Makoto OGATA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 11,340,152
- Issue date May 24, 2022
- Tokyo Electron Limited
- Masato Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 11,002,656
- Issue date May 11, 2021
- Tokyo Electron Limited
- Masato Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD
- Publication number 20240094644
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Makoto OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20210247286
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TANK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF USING THE TANK
- Publication number 20200357662
- Publication date Nov 12, 2020
- TOKYO ELECTRON LIMITED
- Tomohiko MUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20200240891
- Publication date Jul 30, 2020
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- G01 - MEASURING TESTING