Membership
Tour
Register
Log in
Makoto Saito
Follow
Person
Okayama, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Wafer holder
Patent number
6,474,987
Issue date
Nov 5, 2002
Mitsubishi Materials Silicon Corporation
Tetsuya Nakai
C30 - CRYSTAL GROWTH