Makoto SAKAKIBARA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern inspecting device
- Patent number 12,176,181
- Issue date Dec 24, 2024
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 12,125,667
- Issue date Oct 22, 2024
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and inspection method
- Patent number 12,057,288
- Issue date Aug 6, 2024
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,967,482
- Issue date Apr 23, 2024
- HITACHI HIGH-TECH CORPORATION
- Wen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam observation device, electron beam observation system,...
- Patent number 11,791,130
- Issue date Oct 17, 2023
- HITACHI HIGH-TECH CORPORATION
- Koichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adhesive application apparatus
- Patent number 11,518,110
- Issue date Dec 6, 2022
- Momentive Performance Materials Japan LLC
- Makoto Sakakibara
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Measurement system and method for setting observation conditions of...
- Patent number 11,380,518
- Issue date Jul 5, 2022
- Hitachi, Ltd.
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam apparatus
- Patent number 11,282,671
- Issue date Mar 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Uki Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,257,658
- Issue date Feb 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and electron beam application device
- Patent number 11,227,740
- Issue date Jan 18, 2022
- HITACHI HIGH-TECH CORPORATION
- Soichiro Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam observation device, electron beam observation system,...
- Patent number 11,170,969
- Issue date Nov 9, 2021
- HITACHI HIGH-TECH CORPORATION
- Koichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and sample observation method using sc...
- Patent number 11,011,348
- Issue date May 18, 2021
- HITACHI HIGH-TECH CORPORATION
- Daisuke Bizen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 10,825,649
- Issue date Nov 3, 2020
- Hitachi, Ltd.
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image forming apparatus
- Patent number 10,755,396
- Issue date Aug 25, 2020
- Hitachi, Ltd.
- Momoyo Enyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measuring device and measuring method
- Patent number 10,707,047
- Issue date Jul 7, 2020
- HITACHI HIGH-TECH CORPORATION
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,636,618
- Issue date Apr 28, 2020
- Hitachi High-Technologies Corporation
- Kaori Bizen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle detector and charged particle beam device using th...
- Patent number 10,361,063
- Issue date Jul 23, 2019
- Hitachi, Ltd.
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,319,562
- Issue date Jun 11, 2019
- Hitachi, Ltd.
- Megumi Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,217,604
- Issue date Feb 26, 2019
- Hitachi High-Technologies Corporation
- Makoto Sakakibara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and method for controlling same
- Patent number 10,014,160
- Issue date Jul 3, 2018
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, simulation method, and simulation device
- Patent number 9,966,225
- Issue date May 8, 2018
- Hitachi, Ltd.
- Daisuke Bizen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern critical dimension measurement equipment and method for mea...
- Patent number 9,520,266
- Issue date Dec 13, 2016
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,287,082
- Issue date Mar 15, 2016
- Hitachi High-Technologies Corporation
- Kenichi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement method of electron beam current, electron beam writing...
- Patent number 7,425,714
- Issue date Sep 16, 2008
- Hitachi High-Technologies Corporation
- Makoto Sakakibara
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam writing system and electron beam writing method
- Patent number 7,423,274
- Issue date Sep 9, 2008
- Hitachi High-Technologies Corporation
- Yoshinori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR INSPECTION DEVICE AND METHOD FOR INSPECTING SEMICONDU...
- Publication number 20230273253
- Publication date Aug 31, 2023
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro SHIRASAKI
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20230064202
- Publication date Mar 2, 2023
- HITACHI HIGH-TECH CORPORATION
- Kazuo OOTSUGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220359149
- Publication date Nov 10, 2022
- HITACHI HIGH-TECH CORPORATION
- Makoto SAKAKIBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220359150
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTING DEVICE
- Publication number 20220359151
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam Device and Inspection Method
- Publication number 20220328279
- Publication date Oct 13, 2022
- Hitachi High-Tech Corporation
- Momoyo ENYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220328281
- Publication date Oct 13, 2022
- Hitachi High-Tech Corporation
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220102105
- Publication date Mar 31, 2022
- Hitachi High-Tech Corporation
- Wen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Observation Device, Electron Beam Observation System,...
- Publication number 20220051868
- Publication date Feb 17, 2022
- Hitachi High-Tech Corporation
- Koichi HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Measurement System and Method for Setting Observation Conditions of...
- Publication number 20210407763
- Publication date Dec 30, 2021
- Hitachi, Ltd
- Takafumi MIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADHESIVE APPLICATION APPARATUS
- Publication number 20210260833
- Publication date Aug 26, 2021
- MOMENTIVE PERFORMANCE MATERIALS JAPAN LLC
- Makoto SAKAKIBARA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
ELECTRON BEAM OBSERVATION DEVICE, ELECTRON BEAM OBSERVATION SYSTEM,...
- Publication number 20210125806
- Publication date Apr 29, 2021
- Hitachi High-Technologies Corporation
- Koichi HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE
- Publication number 20200266020
- Publication date Aug 20, 2020
- Hitachi High-Technologies Corporation
- Soichiro MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-Particle Beam Apparatus
- Publication number 20200185189
- Publication date Jun 11, 2020
- Hitachi High-Technologies Corporation
- Uki IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20200105501
- Publication date Apr 2, 2020
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD USING SC...
- Publication number 20190348255
- Publication date Nov 14, 2019
- Hitachi High-Technologies Corporation
- Daisuke BIZEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE
- Publication number 20190295805
- Publication date Sep 26, 2019
- Hitachi, Ltd
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING DEVICE AND MEASURING METHOD
- Publication number 20190206654
- Publication date Jul 4, 2019
- Hitachi High-Technologies Corporation
- Noritsugu TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20190066969
- Publication date Feb 28, 2019
- Hitachi High-Technologies Corporation
- Kaori BIZEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20180286629
- Publication date Oct 4, 2018
- Hitachi High-Technologies Corporation
- Makoto SAKAKIBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20180261426
- Publication date Sep 13, 2018
- Hitachi, Ltd
- Megumi KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Detector and Charged Particle Beam Device Using th...
- Publication number 20180261425
- Publication date Sep 13, 2018
- Hitachi, Ltd
- Yasuhiro SHIRASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE FORMING APPARATUS
- Publication number 20180232869
- Publication date Aug 16, 2018
- Hitachi, Ltd
- Momoyo ENYAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, SIMULATION METHOD, AND SIMULATION DEVICE
- Publication number 20170213695
- Publication date Jul 27, 2017
- Hitachi, Ltd
- Daisuke BIZEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND METHOD FOR CONTROLLING SAME
- Publication number 20170186583
- Publication date Jun 29, 2017
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- G01 - MEASURING TESTING
Information Patent Application
TWO-PACK CURABLE POLYORGANOSILOXANE COMPOSITION AND USE THEREOF
- Publication number 20150337188
- Publication date Nov 26, 2015
- MOMENTIVE PERFORMANCE MATERIALS JAPAN LLC
- Makoto SAKAKIBARA
- B32 - LAYERED PRODUCTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150228443
- Publication date Aug 13, 2015
- Hitachi High-Technologies Corporation
- Kenichi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN CRITICAL DIMENSION MEASUREMENT EQUIPMENT AND METHOD FOR MEA...
- Publication number 20150041648
- Publication date Feb 12, 2015
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS AND LENS ARRAY
- Publication number 20130248731
- Publication date Sep 26, 2013
- Hitachi High-Technologies Corporation
- Sayaka TANIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT CURABLE ADHESIVE COMPOSITION, ARTICLE, SEMICONDUCTOR APPARATUS...
- Publication number 20080090085
- Publication date Apr 17, 2008
- 3M Innovative Properties Company
- Kohichiro Kawate
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Makoto SAKAKIBARA

Person

Patents Grantslast 30 patents

Pattern inspecting device

Charged particle beam device

Charged particle beam device and inspection method

Charged particle beam device

Electron beam observation device, electron beam observation system,...

Adhesive application apparatus

Measurement system and method for setting observation conditions of...

Charged-particle beam apparatus

Charged particle beam apparatus

Electron gun and electron beam application device

Electron beam observation device, electron beam observation system,...

Scanning electron microscope and sample observation method using sc...

Electron beam device

Image forming apparatus

Measuring device and measuring method

Charged particle beam apparatus

Charged particle detector and charged particle beam device using th...

Charged particle beam device

Charged particle beam apparatus

Scanning electron microscope and method for controlling same

Charged particle beam device, simulation method, and simulation device

Pattern critical dimension measurement equipment and method for mea...

Charged particle beam apparatus

Measurement method of electron beam current, electron beam writing...

Electron beam writing system and electron beam writing method

Patents Applicationslast 30 patents

SEMICONDUCTOR INSPECTION DEVICE AND METHOD FOR INSPECTING SEMICONDU...

CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM DEVICE

PATTERN INSPECTING DEVICE

Charged Particle Beam Device and Inspection Method

CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM DEVICE

Electron Beam Observation Device, Electron Beam Observation System,...

Measurement System and Method for Setting Observation Conditions of...

ADHESIVE APPLICATION APPARATUS

ELECTRON BEAM OBSERVATION DEVICE, ELECTRON BEAM OBSERVATION SYSTEM,...

ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE

Charged-Particle Beam Apparatus

CHARGED PARTICLE BEAM APPARATUS

SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD USING SC...

ELECTRON BEAM DEVICE

MEASURING DEVICE AND MEASURING METHOD

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM DEVICE

Charged Particle Detector and Charged Particle Beam Device Using th...

IMAGE FORMING APPARATUS

CHARGED PARTICLE BEAM DEVICE, SIMULATION METHOD, AND SIMULATION DEVICE

SCANNING ELECTRON MICROSCOPE AND METHOD FOR CONTROLLING SAME

TWO-PACK CURABLE POLYORGANOSILOXANE COMPOSITION AND USE THEREOF

CHARGED PARTICLE BEAM APPARATUS

PATTERN CRITICAL DIMENSION MEASUREMENT EQUIPMENT AND METHOD FOR MEA...

ELECTRON BEAM APPARATUS AND LENS ARRAY

HEAT CURABLE ADHESIVE COMPOSITION, ARTICLE, SEMICONDUCTOR APPARATUS...