Makoto Sambu

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 6,503,079
- Issue date Jan 7, 2003
- Hitachi Kokusai Electric Inc.
- Minoru Kogano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and method for manufacturing semicon...
- Publication number 20020094502
- Publication date Jul 18, 2002
- HITACHI KOKUSAI ELECTRIC INC.
- Minoru Kogano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...