Makoto Shibuta

Person

Saitama-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate holding apparatus, exposure apparatus, and device fabrica...
- Patent number 9,964,860
- Issue date May 8, 2018
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 9,904,182
- Issue date Feb 27, 2018
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding apparatus, exposure apparatus, and device fabrica...
- Patent number 9,690,206
- Issue date Jun 27, 2017
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 9,470,984
- Issue date Oct 18, 2016
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device, exposure apparatus, and device manufactur...
- Patent number 9,341,959
- Issue date May 17, 2016
- Nikon Corporation
- Makoto Shibuta
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Immersion exposure apparatus and method with detection of liquid on...
- Patent number 9,250,537
- Issue date Feb 2, 2016
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding apparatus, exposure apparatus, and device fabrica...
- Patent number 9,224,632
- Issue date Dec 29, 2015
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,456,609
- Issue date Jun 4, 2013
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion exposure apparatus and device manufacturing method to det...
- Patent number 8,384,874
- Issue date Feb 26, 2013
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,368,870
- Issue date Feb 5, 2013
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device, exposure apparatus, and device manufactur...
- Patent number 8,102,512
- Issue date Jan 24, 2012
- Nikon Corporation
- Makoto Shibuta
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate holding apparatus, exposure apparatus, exposing method, a...
- Patent number 8,089,615
- Issue date Jan 3, 2012
- Nikon Corporation
- Takeyuki Mizutani
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,456,929
- Issue date Nov 25, 2008
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
- Publication number 20180292759
- Publication date Oct 11, 2018
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICA...
- Publication number 20180246417
- Publication date Aug 30, 2018
- Nikon Corporation
- Makoto Shibuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20180136571
- Publication date May 17, 2018
- Nikon Corporation
- Makoto SHIBUTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICA...
- Publication number 20170255109
- Publication date Sep 7, 2017
- Nikon Corporation
- Makoto Shibuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20170023868
- Publication date Jan 26, 2017
- Nikon Corporation
- Makoto SHIBUTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
- Publication number 20160231653
- Publication date Aug 11, 2016
- Nikon Corporation
- Hiroyuki NAGASAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICA...
- Publication number 20160131981
- Publication date May 12, 2016
- Nikon Corporation
- Makoto Shibuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMMERSION EXPOSURE APPARATUS AND METHOD WITH DETECTION OF LIQUID ON...
- Publication number 20160109810
- Publication date Apr 21, 2016
- Nikon Corporation
- Makoto SHIBUTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20130148090
- Publication date Jun 13, 2013
- Nikon Corporation
- Makoto SHIBUTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus and Device Manufacturing Method
- Publication number 20130128245
- Publication date May 23, 2013
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
- Publication number 20120094238
- Publication date Apr 19, 2012
- Nikon Corporation
- Hiroyuki NAGASAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Maintenance method, exposure method and apparatus, and device manuf...
- Publication number 20090109413
- Publication date Apr 30, 2009
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20090066923
- Publication date Mar 12, 2009
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate holding apparatus, exposure apparatus, exposing method, a...
- Publication number 20080239275
- Publication date Oct 2, 2008
- Nikon Corporation
- Takeyuki MIZUTANI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Holding Apparatus, Exposure Apparatus, and Device Fabrica...
- Publication number 20080111984
- Publication date May 15, 2008
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus and Device Manufacturing Method
- Publication number 20080111978
- Publication date May 15, 2008
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus and Device Manufacturing Method
- Publication number 20080043210
- Publication date Feb 21, 2008
- Nikon Corporation
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Holding Device, Exposure Apparatus, and Device Manufactur...
- Publication number 20070269294
- Publication date Nov 22, 2007
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20070182945
- Publication date Aug 9, 2007
- Makoto Shibuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Makoto Shibuta

Person

Patents Grantslast 30 patents

Substrate holding apparatus, exposure apparatus, and device fabrica...

Exposure apparatus

Substrate holding apparatus, exposure apparatus, and device fabrica...

Exposure apparatus

Substrate holding device, exposure apparatus, and device manufactur...

Immersion exposure apparatus and method with detection of liquid on...

Substrate holding apparatus, exposure apparatus, and device fabrica...

Exposure apparatus and device manufacturing method

Immersion exposure apparatus and device manufacturing method to det...

Exposure apparatus and device manufacturing method

Substrate holding device, exposure apparatus, and device manufactur...

Substrate holding apparatus, exposure apparatus, exposing method, a...

Exposure apparatus and device manufacturing method

Patents Applicationslast 30 patents

SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...

SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICA...

EXPOSURE APPARATUS

SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICA...

EXPOSURE APPARATUS

SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...

SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICA...

IMMERSION EXPOSURE APPARATUS AND METHOD WITH DETECTION OF LIQUID ON...

EXPOSURE APPARATUS

Exposure Apparatus and Device Manufacturing Method

SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...

Maintenance method, exposure method and apparatus, and device manuf...

Exposure apparatus and device manufacturing method

Substrate holding apparatus, exposure apparatus, exposing method, a...

Substrate Holding Apparatus, Exposure Apparatus, and Device Fabrica...

Exposure Apparatus and Device Manufacturing Method

Exposure Apparatus and Device Manufacturing Method

Substrate Holding Device, Exposure Apparatus, and Device Manufactur...

Exposure apparatus and device manufacturing method