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Makoto Shinohara
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Yokohama, JP
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last 30 patents
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Patent Grant
Wafer holder
Patent number
6,474,987
Issue date
Nov 5, 2002
Mitsubishi Materials Silicon Corporation
Tetsuya Nakai
C30 - CRYSTAL GROWTH
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Patent Grant
Ultra-high-temperature heat treatment apparatus
Patent number
6,414,277
Issue date
Jul 2, 2002
Shinku Giken Co., Ltd.
Toshio Nanbu
C30 - CRYSTAL GROWTH