TREA

Makoto Shinohara

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  • Yokohama, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer holder
    • Patent number 6,474,987
    • Issue date Nov 5, 2002
    • Mitsubishi Materials Silicon Corporation
    • Tetsuya Nakai
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Ultra-high-temperature heat treatment apparatus
    • Patent number 6,414,277
    • Issue date Jul 2, 2002
    • Shinku Giken Co., Ltd.
    • Toshio Nanbu
    • C30 - CRYSTAL GROWTH