Makoto Tabata

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Kakamigahara, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for polishing a semiconductor wafer
- Patent number 10,189,142
- Issue date Jan 29, 2019
- Siltronic AG
- Klaus Roettger
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR POLISHING A SEMICONDUCTOR WAFER
- Publication number 20140206261
- Publication date Jul 24, 2014
- Siltronic AG
- Klaus Roettger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR POLISHING A SEMICONDUCTOR WAFER, COMPRISING THE SIMULTA...
- Publication number 20140141613
- Publication date May 22, 2014
- Siltronic AG
- Alexander Heilmaier
- H01 - BASIC ELECTRIC ELEMENTS