Makoto TAKADO

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Raw material gas supply method
- Patent number 9,563,209
- Issue date Feb 7, 2017
- Tokyo Electron Limited
- Mitsuya Inoue
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY DEVICE, FILM FORMING APPARATUS, GAS SUPPLY METHOD, AND S...
- Publication number 20150140694
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Mitsuya INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD AND PROCESSING APPARATUS
- Publication number 20140290752
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Hiroyuki Matsuura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RAW MATERIAL GAS SUPPLY DEVICE, FILM FORMING APPARATUS, FLOW RATE M...
- Publication number 20140209021
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Mitsuya INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY DEVICE, FILM FORMING APPARATUS, RAW MATERIA...
- Publication number 20140209022
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Mitsuya INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...