TREA

Makoto TAKAHASHI

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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus
    • Patent number 9,163,311
    • Issue date Oct 20, 2015
    • Tokyo Electron Limited
    • Harunari Hasegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240295023
    • Publication date Sep 5, 2024
    • TOKYO ELECTRON LIMITED
    • Makoto TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240295024
    • Publication date Sep 5, 2024
    • TOKYO ELECTRON LIMITED
    • Makoto TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20230416920
    • Publication date Dec 28, 2023
    • TOKYO ELECTRON LIMITED
    • Tatsuya YAMAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATION METHOD OF HEAT...
    • Publication number 20230417488
    • Publication date Dec 28, 2023
    • TOKYO ELECTRON LIMITED
    • Makoto TAKAHASHI
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20120180727
    • Publication date Jul 19, 2012
    • TOKYO ELECTRON LIMITED
    • Harunari HASEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20120160169
    • Publication date Jun 28, 2012
    • TOKYO ELECTRON LIMITED
    • Harunari HASEGAWA
    • H01 - BASIC ELECTRIC ELEMENTS