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Makoto TAKAOKA
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Kyoto, JP
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last 30 patents
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Patent Grant
Processing condition selection method, substrate processing method,...
Patent number
12,142,502
Issue date
Nov 12, 2024
SCREEN Holdings Co., Ltd.
Takashi Ota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing device
Patent number
11,521,865
Issue date
Dec 6, 2022
SCREEN Holdings Co., Ltd.
Hiroki Tsujikawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
10,854,481
Issue date
Dec 1, 2020
SCREEN Holdings Co., Ltd.
Shigeki Tanizawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PROCESSING CONDITION SELECTION METHOD, SUBSTRATE PROCESSING METHOD,...
Publication number
20220148896
Publication date
May 12, 2022
SCREEN Holdings Co., Ltd.
Takashi OTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20200144081
Publication date
May 7, 2020
SCREEN Holdings Co., Ltd.
Hiroki TSUJIKAWA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20190067047
Publication date
Feb 28, 2019
SCREEN Holdings Co., Ltd.
Shigeki TANIZAWA
H01 - BASIC ELECTRIC ELEMENTS