Makoto TANAKA

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Oyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Laser chamber and electronic device manufacturing method
- Patent number 11,947,263
- Issue date Apr 2, 2024
- Gigaphoton Inc.
- Makoto Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LASER DEVICE AND LEAK CHECK METHOD FOR LASER DEVICE
- Publication number 20220190540
- Publication date Jun 16, 2022
- Gigaphoton Inc.
- Hiroaki TSUSHIMA
- G01 - MEASURING TESTING
Information Patent Application
LASER CHAMBER AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20220091515
- Publication date Mar 24, 2022
- Gigaphoton Inc.
- Makoto TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20210367390
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Daisuke TEI
- H01 - BASIC ELECTRIC ELEMENTS