Makoto Toraguchi

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing device and a method of plasma process
- Patent number 6,284,674
- Issue date Sep 4, 2001
- Tokyo Electron Limited
- Makoto Toraguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ozone production facilities and method of their operation
- Patent number 6,277,248
- Issue date Aug 21, 2001
- Fuji Electric Co., Ltd.
- Hisamichi Ishioka
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Plasma processing device and a method of plasma process
- Patent number 6,161,498
- Issue date Dec 19, 2000
- Tokyo Electron Limited
- Makoto Toraguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ozone generator
- Patent number 6,027,701
- Issue date Feb 22, 2000
- Fuji Electric Co., Ltd.
- Hisamichi Ishioka
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ozone production facilities and method of their operation
- Patent number 6,027,700
- Issue date Feb 22, 2000
- Fuji Electric Co., Ltd.
- Hisamichi Ishioka
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Plasma deposition method and an apparatus therefor
- Patent number 5,948,485
- Issue date Sep 7, 1999
- Tokyo Electron Limited
- Hideaki Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 5,160,152
- Issue date Nov 3, 1992
- Fuji Electric Co., Ltd.
- Makoto Toraguchi
- H01 - BASIC ELECTRIC ELEMENTS

Makoto Toraguchi

Person

Patents Grantslast 30 patents

Plasma processing device and a method of plasma process

Ozone production facilities and method of their operation

Plasma processing device and a method of plasma process

Ozone generator

Ozone production facilities and method of their operation

Plasma deposition method and an apparatus therefor

Electrostatic chuck