Makoto Umeki

Follow

Person

Kai-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film formation apparatus and method of using the same
- Patent number 7,604,010
- Issue date Oct 20, 2009
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Film formation apparatus and method of using the same
- Publication number 20060042544
- Publication date Mar 2, 2006
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...