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Makoto Yonezawa
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Yokohama City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Analysis apparatus and analysis method
Patent number
9,638,729
Issue date
May 2, 2017
LASERTEC CORPORATION
Hiroyuki Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image pickup apparatus and defect inspection system for photomask
Patent number
6,727,987
Issue date
Apr 27, 2004
Lasertec Corporation
Makoto Yonezawa
G01 - MEASURING TESTING
Information
Patent Grant
Image pickup apparatus and defect inspection apparatus for photomask
Patent number
6,654,110
Issue date
Nov 25, 2003
Lasertec Corporation
Makoto Yonezawa
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
ANALYSIS APPARATUS AND ANALYSIS METHOD
Publication number
20140136132
Publication date
May 15, 2014
Lasertec Corporation
Hiroyuki MAEKAWA
G01 - MEASURING TESTING
Information
Patent Application
IMAGE PICKUP APPARATUS AND DEFECT INSPECTION APPARATUS FOR PHOTOMASK
Publication number
20030189703
Publication date
Oct 9, 2003
Lasertec Corporation
Makoto Yonezawa
G01 - MEASURING TESTING
Information
Patent Application
Image pickup apparatus and defect inspection system for photomask
Publication number
20020044277
Publication date
Apr 18, 2002
LASERTEC CORPORATION
Makoto Yonezawa
G01 - MEASURING TESTING