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Makoto Yoshida
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Omihachiman-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Film formation apparatus and method of using the same
Patent number
7,604,010
Issue date
Oct 20, 2009
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR ESTIMATING REMAINING AMOUNT OF SOLID RAW MATAERIAL, METH...
Publication number
20230366084
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Yuji OBATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Film formation apparatus and method of using the same
Publication number
20060042544
Publication date
Mar 2, 2006
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...