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Fukushima, JP
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last 30 patents
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Patent Grant
Quartz glass having excellent resistance against plasma corrosion a...
Patent number
7,661,277
Issue date
Feb 16, 2010
Shin-Etsu Quartz Products Co., Ltd.
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Quartz glass having excellent resistance against plasma corrosion a...
Patent number
7,365,037
Issue date
Apr 29, 2008
Shin-Etsu Quartz Products Co., Ltd.
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Method of producing cristobalite containing silica glass
Patent number
5,876,473
Issue date
Mar 2, 1999
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
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last 30 patents
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Patent Application
Quartz glass having excellent resistance against plasma corrosion a...
Publication number
20080113174
Publication date
May 15, 2008
Shin-Etsu Quartz Products Co., Ltd.
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
Quartz glass having excellent resistance against plasma corrosion a...
Publication number
20050272588
Publication date
Dec 8, 2005
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL