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Mamoru KOSAKAI

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Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 11,887,877
    • Issue date Jan 30, 2024
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 11,664,261
    • Issue date May 30, 2023
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ceramic substrate and susceptor
    • Patent number 11,551,962
    • Issue date Jan 10, 2023
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device and method for manufacturing electrostat...
    • Patent number 11,107,719
    • Issue date Aug 31, 2021
    • Sumitomo Osaka Cement Co., Ltd.
    • Nobuhiro Hidaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 10,923,381
    • Issue date Feb 16, 2021
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 10,622,239
    • Issue date Apr 14, 2020
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plate-shaped body for temperature measurement and temperature measu...
    • Patent number 10,502,639
    • Issue date Dec 10, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 10,475,687
    • Issue date Nov 12, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device, and semiconductor manufacturing device
    • Patent number 10,475,688
    • Issue date Nov 12, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Kazunori Ishimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 10,256,131
    • Issue date Apr 9, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 10,153,192
    • Issue date Dec 11, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chucking device
    • Patent number 10,079,167
    • Issue date Sep 18, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck apparatus
    • Patent number 9,721,822
    • Issue date Aug 1, 2017
    • Tokyo Electron Limited
    • Yasuharu Sasaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 9,466,518
    • Issue date Oct 11, 2016
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 9,412,635
    • Issue date Aug 9, 2016
    • Tokyo Electron Limited
    • Yasuharu Sasaki
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Electrostatic chuck apparatus
    • Patent number 9,343,346
    • Issue date May 17, 2016
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 9,269,600
    • Issue date Feb 23, 2016
    • Sumitomo Osaka Cement Co., Ltd.
    • Yukio Miura
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 9,209,061
    • Issue date Dec 8, 2015
    • Sumitomo Osaka Cement Co., Ltd.
    • Ryuuji Hayahara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck apparatus
    • Patent number 8,981,263
    • Issue date Mar 17, 2015
    • Tokyo Electron Limited
    • Yasuharu Sasaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 8,284,538
    • Issue date Oct 9, 2012
    • Tokyo Electron Limited
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 8,264,813
    • Issue date Sep 11, 2012
    • Sumitomo Osaka Cement Co., Ltd.
    • Hiroshi Inazumachi
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 7,646,581
    • Issue date Jan 12, 2010
    • Sumitomo Osaka Cement Co., Ltd.
    • Yasuharu Sasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 7,619,870
    • Issue date Nov 17, 2009
    • Tokyo Electron Limited
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Attracting plate of an electrostatic chuck for semiconductor manufa...
    • Patent number D587222
    • Issue date Feb 24, 2009
    • Tokyo Electron Limited
    • Yasuharu Sasaki
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Bonding method, bonding stage and electronic component packaging ap...
    • Patent number 6,991,703
    • Issue date Jan 31, 2006
    • Sumitomo Osaka Cement Co., Ltd.
    • Takeshi Ootsuka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck and manufacturing method therefor
    • Patent number 6,950,297
    • Issue date Sep 27, 2005
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Susceptor with built-in electrode and manufacturing method therefor
    • Patent number 6,872,908
    • Issue date Mar 29, 2005
    • Sumitomo Osaka Cement Co., Ltd.
    • Takeshi Ootsuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Susceptor device
    • Patent number 6,838,646
    • Issue date Jan 4, 2005
    • Sumitomo Osaka Cement Co., Ltd.
    • Hiroshi Inazumachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Susceptor with built-in plasma generation electrode and manufacturi...
    • Patent number 6,768,079
    • Issue date Jul 27, 2004
    • Sumitomo Osaka Cement Co. Ltd.
    • Mamoru Kosakai
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Plastic film electrostatic adsorption apparatus and electrostatic a...
    • Patent number 6,730,276
    • Issue date May 4, 2004
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

  • Information Patent Application

    CERAMIC SUBSTRATE AND SUSCEPTOR
    • Publication number 20210013081
    • Publication date Jan 14, 2021
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru KOSAKAI
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20200273736
    • Publication date Aug 27, 2020
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru KOSAKAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20200266088
    • Publication date Aug 20, 2020
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru KOSAKAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20190088517
    • Publication date Mar 21, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru KOSAKAI
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE AND METHOD FOR MANUFACTURING ELECTROSTAT...
    • Publication number 20190019713
    • Publication date Jan 17, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Nobuhiro HIDAKA
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20190019714
    • Publication date Jan 17, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru KOSAKAI
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20180269097
    • Publication date Sep 20, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi MAETA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20180254211
    • Publication date Sep 6, 2018
    • Mamoru KOSAKAI
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20180108555
    • Publication date Apr 19, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru KOSAKAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE, AND SEMICONDUCTOR MANUFACTURING DEVICE
    • Publication number 20180025933
    • Publication date Jan 25, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Kazunori ISHIMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCKING DEVICE
    • Publication number 20170323819
    • Publication date Nov 9, 2017
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru KOSAKAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK APPARATUS
    • Publication number 20150179492
    • Publication date Jun 25, 2015
    • TOKYO ELECTRON LIMITED
    • Yasuharu Sasaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20140376148
    • Publication date Dec 25, 2014
    • Yasuharu Sasaki
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20140355169
    • Publication date Dec 4, 2014
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20140301010
    • Publication date Oct 9, 2014
    • Sumitomo Osaka Cement Co., Ltd.
    • Ryuuji Hayahara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLATE-SHAPED BODY FOR TEMPERATURE MEASUREMENT AND TEMPERATURE MEASU...
    • Publication number 20140204975
    • Publication date Jul 24, 2014
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • G01 - MEASURING TESTING
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20140042716
    • Publication date Feb 13, 2014
    • Sumitomo Osaka Cement Co., Ltd.
    • Yukio Miura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK APPARATUS
    • Publication number 20120299253
    • Publication date Nov 29, 2012
    • SUMITOMO OSAKA CEMENT CO., LTD.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK APPARATUS
    • Publication number 20120281334
    • Publication date Nov 8, 2012
    • SUMITOMO OSAKA CEMENT CO., LTD.
    • Yasuharu Sasaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20100002354
    • Publication date Jan 7, 2010
    • Hiroshi Inazumachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20080062610
    • Publication date Mar 13, 2008
    • Shinji HIMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20080062609
    • Publication date Mar 13, 2008
    • Shinji HIMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20080062611
    • Publication date Mar 13, 2008
    • Shinji HIMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20080037195
    • Publication date Feb 14, 2008
    • Shinji HIMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20070217114
    • Publication date Sep 20, 2007
    • Yasuharu Sasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Susceptor device
    • Publication number 20040065259
    • Publication date Apr 8, 2004
    • Sumitomo Osaka Cement Co., Ltd.
    • Hiroshi Inazumachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Bonding method, bonding stage and electronic component packaging ap...
    • Publication number 20040063251
    • Publication date Apr 1, 2004
    • Sumitomo Osaka Cement Co., Ltd.
    • Takeshi Ootsuka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Electrostatic chuck and manufacturing method therefor
    • Publication number 20030123213
    • Publication date Jul 3, 2003
    • Sumitomo Osaka Cement Co. Ltd
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Susceptor with built-in plasma generation electrode and manufacturi...
    • Publication number 20030085206
    • Publication date May 8, 2003
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Susceptor with built-in electrode and manufacturing method therefor
    • Publication number 20030071260
    • Publication date Apr 17, 2003
    • Sumitomo Osaka Cement Co., Ltd.
    • Takeshi Ootsuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...