Mamoru Nakasuji

Person

Yokohama-shi, Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electro-optical inspection apparatus using electron beam
- Patent number 9,390,886
- Issue date Jul 12, 2016
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 9,368,314
- Issue date Jun 14, 2016
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 8,822,919
- Issue date Sep 2, 2014
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Charged particles beam apparatus and charged particles beam apparat...
- Patent number 8,809,799
- Issue date Aug 19, 2014
- Mamoru Nakasuji
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,803,103
- Issue date Aug 12, 2014
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,368,031
- Issue date Feb 5, 2013
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and a device manufacturing method by using...
- Patent number 8,368,016
- Issue date Feb 5, 2013
- Ebara Corporation
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam apparatus
- Patent number 8,067,732
- Issue date Nov 29, 2011
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,053,726
- Issue date Nov 8, 2011
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 7,928,378
- Issue date Apr 19, 2011
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,888,642
- Issue date Feb 15, 2011
- Ebara Corporation
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam apparatus and an aberration correction optical apparatus
- Patent number 7,863,580
- Issue date Jan 4, 2011
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sheet beam-type testing apparatus
- Patent number 7,829,871
- Issue date Nov 9, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,745,784
- Issue date Jun 29, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,601,972
- Issue date Oct 13, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Method of electric discharge machining a cathode for an electron gun
- Patent number 7,598,471
- Issue date Oct 6, 2009
- Ebara Corporation
- Muneki Hamashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection system and inspection method and method of...
- Patent number 7,569,838
- Issue date Aug 4, 2009
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and device manufacturing method using the same
- Patent number 7,479,634
- Issue date Jan 20, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and device production method using the elec...
- Patent number 7,439,502
- Issue date Oct 21, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus, a device manufacturing method using the sa...
- Patent number 7,425,703
- Issue date Sep 16, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,423,267
- Issue date Sep 9, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Objective lens, electron beam system and method of inspecting defect
- Patent number 7,420,164
- Issue date Sep 2, 2008
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sheet beam-type testing apparatus
- Patent number 7,417,236
- Issue date Aug 26, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,411,191
- Issue date Aug 12, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 7,408,175
- Issue date Aug 5, 2008
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting samples, and method for manufac...
- Patent number 7,408,643
- Issue date Aug 5, 2008
- Ebara Corporation
- Toshifumi Kimba
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron beam apparatus and a device manufacturing method using the...
- Patent number 7,385,197
- Issue date Jun 10, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and a device manufacturing method by using...
- Patent number 7,361,895
- Issue date Apr 22, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam inspection system and inspection method and method of...
- Patent number 7,351,969
- Issue date Apr 1, 2008
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam system and method of manufacturing devices using the...
- Patent number 7,312,449
- Issue date Dec 25, 2007
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
- Publication number 20140367570
- Publication date Dec 18, 2014
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140319346
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Charged practicles beam apparatus and charged particles beam appara...
- Publication number 20140097352
- Publication date Apr 10, 2014
- Mamoru Nakasuji
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140034831
- Publication date Feb 6, 2014
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS AND A DEVICE MANUFACTURING METHOD BY USING...
- Publication number 20130032716
- Publication date Feb 7, 2013
- EBARA CORPORATION
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20120032079
- Publication date Feb 9, 2012
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...
- Publication number 20110104830
- Publication date May 5, 2011
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
Electron Beam Apparatus
- Publication number 20100213370
- Publication date Aug 26, 2010
- Mamoru Nakasuji
- G02 - OPTICS
Information Patent Application
ELECTRON BEAM APPARATUS
- Publication number 20090218506
- Publication date Sep 3, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROJECTION ELECTRON BEAM APPARATUS AND DEFECT INSPECTION SYSTEM USI...
- Publication number 20090212213
- Publication date Aug 27, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20090050822
- Publication date Feb 26, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20090039262
- Publication date Feb 12, 2009
- EBARA CORPORATION
- Mamoru NAKASUJI
- G01 - MEASURING TESTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20090032708
- Publication date Feb 5, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS
- Publication number 20090014649
- Publication date Jan 15, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Objective lens, electron beam system and method of inspecting defect
- Publication number 20080315090
- Publication date Dec 25, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus, a device manufacturing method using the sa...
- Publication number 20080315095
- Publication date Dec 25, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspection with electron beam, method for operating s...
- Publication number 20080308729
- Publication date Dec 18, 2008
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
SHEET BEAM-TYPE TESTING APPARATUS
- Publication number 20080302963
- Publication date Dec 11, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and device production method using the elec...
- Publication number 20080173815
- Publication date Jul 24, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam inspection system and inspection method and method of...
- Publication number 20080173814
- Publication date Jul 24, 2008
- EBARA CORPORATION
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for inspecting substrate, substrate inspecting system and el...
- Publication number 20080121804
- Publication date May 29, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS AND AN ABERRATION CORRECTION OPTICAL APPARATUS
- Publication number 20080067377
- Publication date Mar 20, 2008
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20080042060
- Publication date Feb 21, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and device production method using the elec...
- Publication number 20070272859
- Publication date Nov 29, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting samples, and method for manufac...
- Publication number 20070236690
- Publication date Oct 11, 2007
- EBARA CORPORATION
- Toshifumi Kimba
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20070235644
- Publication date Oct 11, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspection with electron beam, method for operating s...
- Publication number 20070194235
- Publication date Aug 23, 2007
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and device manufacturing method using the same
- Publication number 20070164226
- Publication date Jul 19, 2007
- Nikon Corporation
- Muneki Hamashima
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
Electron beam apparatus and device manufacturing method using the same
- Publication number 20070158565
- Publication date Jul 12, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20070057186
- Publication date Mar 15, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Mamoru Nakasuji

Person

Patents Grantslast 30 patents

Electro-optical inspection apparatus using electron beam

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Charged particles beam apparatus and charged particles beam apparat...

Inspection system by charged particle beam and method of manufactur...

Inspection system by charged particle beam and method of manufactur...

Electron beam apparatus and a device manufacturing method by using...

Electron beam apparatus

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Electron beam apparatus and method of manufacturing semiconductor d...

Electron beam apparatus and an aberration correction optical apparatus

Sheet beam-type testing apparatus

Electron beam apparatus and method of manufacturing semiconductor d...

Inspection system by charged particle beam and method of manufactur...

Method of electric discharge machining a cathode for an electron gun

Electron beam inspection system and inspection method and method of...

Electron beam apparatus and device manufacturing method using the same

Electron beam apparatus and device production method using the elec...

Electron beam apparatus, a device manufacturing method using the sa...

Electron beam apparatus and method of manufacturing semiconductor d...

Objective lens, electron beam system and method of inspecting defect

Sheet beam-type testing apparatus

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Method and apparatus for inspecting samples, and method for manufac...

Electron beam apparatus and a device manufacturing method using the...

Electron beam apparatus and a device manufacturing method by using...

Electron beam inspection system and inspection method and method of...

Electron beam system and method of manufacturing devices using the...

Patents Applicationslast 30 patents

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

Charged practicles beam apparatus and charged particles beam appara...

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

ELECTRON BEAM APPARATUS AND A DEVICE MANUFACTURING METHOD BY USING...

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...

Electron Beam Apparatus

ELECTRON BEAM APPARATUS

PROJECTION ELECTRON BEAM APPARATUS AND DEFECT INSPECTION SYSTEM USI...

Electron beam apparatus and method of manufacturing semiconductor d...

ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...

Inspection system by charged particle beam and method of manufactur...

ELECTRON BEAM APPARATUS

Objective lens, electron beam system and method of inspecting defect

Electron beam apparatus, a device manufacturing method using the sa...

Apparatus for inspection with electron beam, method for operating s...

SHEET BEAM-TYPE TESTING APPARATUS

Electron beam apparatus and device production method using the elec...

Electron beam inspection system and inspection method and method of...

Method for inspecting substrate, substrate inspecting system and el...

ELECTRON BEAM APPARATUS AND AN ABERRATION CORRECTION OPTICAL APPARATUS

Inspection system by charged particle beam and method of manufactur...

Electron beam apparatus and device production method using the elec...

Method and apparatus for inspecting samples, and method for manufac...

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Electron beam apparatus and device manufacturing method using the same

Electron beam apparatus and device manufacturing method using the same

Inspection system by charged particle beam and method of manufactur...