Mamoru NAOI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 9,524,847
- Issue date Dec 20, 2016
- Tokyo Electron Limited
- Nobuhiro Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,455,125
- Issue date Sep 27, 2016
- Tokyo Electron Limited
- Akihiro Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,592,319
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Nobuhiro Wada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150144266
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140048210
- Publication date Feb 20, 2014
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20110318934
- Publication date Dec 29, 2011
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20110303643
- Publication date Dec 15, 2011
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110240224
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Akihiro YOSHIMURA
- H01 - BASIC ELECTRIC ELEMENTS