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Mamoru Okabe
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Chiba-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Mask defect repair apparatus and mask defect repair method
Patent number
11,906,899
Issue date
Feb 20, 2024
Hitachi High-Tech Science Corporation
Yoshitomo Nakagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and sample processing observation m...
Patent number
10,622,187
Issue date
Apr 14, 2020
Hitachi High-Tech Science Corporation
Yo Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma ion source and charged particle beam apparatus
Patent number
9,773,637
Issue date
Sep 26, 2017
Hitachi High-Technologies Corporation
Hiroshi Oba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma ion source and charged particle beam apparatus
Patent number
9,773,646
Issue date
Sep 26, 2017
Hitachi High-Technologies Corporation
Hiroshi Oba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample holding mechanism and sample working/observing apparatus
Patent number
7,574,932
Issue date
Aug 18, 2009
Sii Nano Technology Inc.
Masakatsu Hasuda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MASK DEFECT REPAIR APPARATUS AND MASK DEFECT REPAIR METHOD
Publication number
20200310246
Publication date
Oct 1, 2020
HITACHI HIGH-TECH SCIENCE CORPORATION
Yoshitomo NAKAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND SAMPLE PROCESSING OBSERVATION M...
Publication number
20190259574
Publication date
Aug 22, 2019
HITACHI HIGH-TECH SCIENCE CORPORATION
Yo YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ION SOURCE AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20160240346
Publication date
Aug 18, 2016
Hitachi High-Technologies Corporation
Hiroshi OBA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ION SOURCE AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20160240354
Publication date
Aug 18, 2016
Hitachi High-Technologies Corporation
Hiroshi OBA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample holding mechanism and sample working/observing apparatus
Publication number
20080224374
Publication date
Sep 18, 2008
Masakatsu Hasuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY