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Mamoru Sueyoshi
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing semiconductor device by forming a film on a...
Patent number
10,032,626
Issue date
Jul 24, 2018
Hitachi Kokusai Electric Inc.
Takaaki Noda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for use in manufacturing a semiconductor device
Patent number
7,033,937
Issue date
Apr 25, 2006
Hitachi Kokusai Electric, Inc.
Kazuyuki Toyoda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for use in manufacturing a semiconductor device
Patent number
6,576,063
Issue date
Jun 10, 2003
Hitachi Kokusai Electric, Inc.
Kazuyuki Toyoda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,217,663
Issue date
Apr 17, 2001
Kokusai Electric Co., Ltd.
Yasuhiro Inokuchi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20170287696
Publication date
Oct 5, 2017
Hitachi Kokusai Electric Inc.
Takaaki NODA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and method for use in manufacturing a semiconductor device
Publication number
20030124876
Publication date
Jul 3, 2003
Kazuyuki Toyoda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and method for use in manufacturing a semiconductor device
Publication number
20010029112
Publication date
Oct 11, 2001
Hitachi Kokusai Electric Inc.
Kazuyuki Toyoda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...