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Mamoru Tashiro
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Microwave enhanced CVD method and apparatus
Patent number
6,677,001
Issue date
Jan 13, 2004
Semiconductor Energy Laboratory Co., Ltd.
Takashi Inujima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
CVD apparatus
Patent number
5,036,794
Issue date
Aug 6, 1991
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film formation method
Patent number
4,987,008
Issue date
Jan 22, 1991
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas discharge lamp having temperature controlled, liquid reservoir...
Patent number
4,949,004
Issue date
Aug 14, 1990
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vapor-phase reaction apparatus
Patent number
4,936,251
Issue date
Jun 26, 1990
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultraviolet light emitting device and application thereof
Patent number
4,910,044
Issue date
Mar 20, 1990
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for forming a layer
Patent number
4,857,139
Issue date
Aug 15, 1989
Semiconductor Energy Laboratory Co., Ltd.
Mamoru Tashiro
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Photo CVD apparatus, with deposition prevention in light source cha...
Patent number
4,811,684
Issue date
Mar 14, 1989
Semiconductor Energy Laboratory Co., Ltd.
Mamoru Tashiro
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for chemical vapor deposition and method of film depositi...
Patent number
4,636,401
Issue date
Jan 13, 1987
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Microwave enhanced CVD method and apparatus
Publication number
20050196549
Publication date
Sep 8, 2005
Semiconductor Energy Laboratory Co., Ltd.
Takashi Inujima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...