Mamoru Yakushiji

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method
- Patent number 11,887,814
- Issue date Jan 30, 2024
- HITACHI HIGH-TECH CORPORATION
- Mamoru Yakushiji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND PLASMA PROCESSING METHOD
- Publication number 20230411167
- Publication date Dec 21, 2023
- Hitachi High-Tech Corporation
- Mamoru Yakushiji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20220384148
- Publication date Dec 1, 2022
- Hitachi High-Tech Corporation
- Mamoru Yakushiji
- H01 - BASIC ELECTRIC ELEMENTS