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Mamoru Yamada
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Kawasaki, JP
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last 30 patents
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Patent Grant
Method and apparatus for generating induced plasma
Patent number
5,680,014
Issue date
Oct 21, 1997
Fuji Electric Co., Ltd.
Masahiro Miyamoto
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Method and apparatus for detecting a reduction in the degree of vac...
Patent number
5,399,973
Issue date
Mar 21, 1995
Fuji Electric Co., Ltd.
Tadao Kitamura
G01 - MEASURING TESTING