Mana TANABE

Person

Yokohama Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,776,823
- Issue date Oct 3, 2023
- Kioxia Corporation
- Mana Tanabe
- B08 - CLEANING
Information Patent Grant
Processing apparatus for processing substrates of different types
- Patent number 11,682,566
- Issue date Jun 20, 2023
- Kioxia Corporation
- Kosuke Takai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,443,963
- Issue date Sep 13, 2022
- Kioxia Corporation
- Mana Tanabe
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 11,185,895
- Issue date Nov 30, 2021
- TOSHIBA MEMORY CORPORATION
- Mana Tanabe
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 11,123,774
- Issue date Sep 21, 2021
- TOSHIBA MEMORY CORPORATION
- Kosuke Takai
- B08 - CLEANING
Information Patent Grant
Manufacturing method of replica template, manufacturing method of s...
- Patent number 11,061,324
- Issue date Jul 13, 2021
- TOSHIBA MEMORY CORPORATION
- Mana Tanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20240096653
- Publication date Mar 21, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Kensuke DEMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20240096652
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Mana TANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220384218
- Publication date Dec 1, 2022
- KIOXIA Corporation
- Mana TANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20210242042
- Publication date Aug 5, 2021
- Toshiba Memory Corporation
- Kosuke TAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200294822
- Publication date Sep 17, 2020
- Toshiba Memory Corporation
- Mana TANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20200078833
- Publication date Mar 12, 2020
- Toshiba Memory Corporation
- Kosuke TAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20200078834
- Publication date Mar 12, 2020
- Toshiba Memory Corporation
- Mana TANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF REPLICA TEMPLATE, MANUFACTURING METHOD OF S...
- Publication number 20190278167
- Publication date Sep 12, 2019
- Toshiba Memory Corporation
- Mana TANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS
- Publication number 20190221452
- Publication date Jul 18, 2019
- Toshiba Memory Corporation
- Kosuke TAKAI
- B08 - CLEANING

Mana TANABE

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Processing apparatus for processing substrates of different types

Substrate processing method and substrate processing apparatus

Substrate processing method, substrate processing apparatus, and co...

Substrate processing method, substrate processing apparatus, and co...

Manufacturing method of replica template, manufacturing method of s...

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...

MANUFACTURING METHOD OF REPLICA TEMPLATE, MANUFACTURING METHOD OF S...

PROCESSING APPARATUS