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Polishing apparatus
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Patent number 5,347,763
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Issue date Sep 20, 1994
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Canon Kabushiki Kaisha
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Masahiko Miyamato
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 4,999,954
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Issue date Mar 19, 1991
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Canon Kabushiki Kaisha
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Masahiko Miyamoto
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 4,974,368
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Issue date Dec 4, 1990
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Canon Kabushiki Kaisha
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Masahiko Miyamoto
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 4,956,944
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Issue date Sep 18, 1990
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Canon Kabushiki Kaisha
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Manabu Ando
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G05 - CONTROLLING REGULATING