Manabu Hama

Follow

Person

Chita -gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method
- Patent number 7,867,926
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Naoyuki Satoh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Reduced-pressure drying unit and coating film forming method
- Patent number 7,534,467
- Issue date May 19, 2009
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thin film processing method and system
- Patent number 7,195,936
- Issue date Mar 27, 2007
- Tokyo Electron Limited
- Tadashi Onishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-processing method and film-processing apparatus
- Patent number 6,903,800
- Issue date Jun 7, 2005
- Tokyo Electron Limited
- Tadashi Onishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced-pressure drying unit and coating film forming method
- Patent number 6,808,566
- Issue date Oct 26, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and method
- Publication number 20090156019
- Publication date Jun 18, 2009
- Naoyuki Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film-processing method and film-processing apparatus
- Publication number 20050196712
- Publication date Sep 8, 2005
- Tadashi Onishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced-pressure drying unit and coating film forming method
- Publication number 20050087129
- Publication date Apr 28, 2005
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thin film processing method and system
- Publication number 20040137760
- Publication date Jul 15, 2004
- TOKYO ELECTRON LIMITED
- Tadashi Onishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film-processing method and film-processing apparatus
- Publication number 20040131351
- Publication date Jul 8, 2004
- Tadashi Onishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced-pressure drying unit and coating film forming method
- Publication number 20030054668
- Publication date Mar 20, 2003
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS