Manabu ISHIKAWA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrode plate for plasma processing apparatus
- Patent number D877079
- Issue date Mar 3, 2020
- TOKYO ELECTRON LIMITED
- Shinichi Kozuka
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Electrode plate for plasma processing apparatus
- Patent number D793572
- Issue date Aug 1, 2017
- Tokyo Electron Limited
- Shinichi Kozuka
- D24 - Medical and laboratory equipment

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20250210330
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20250210331
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Takumi IMAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20250201535
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Sho OIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240420923
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Manabu ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND GAS SUPPLY MEMBER
- Publication number 20160035541
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Shinichi KOZUKA
- H01 - BASIC ELECTRIC ELEMENTS