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Patents Grants
last 30 patents
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Patent Grant
Pattern inspection apparatus and pattern inspection method
Patent number
11,145,050
Issue date
Oct 12, 2021
NuFlare Technology, Inc.
Takafumi Inoue
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspection apparatus, pattern position measurement apparatu...
Patent number
10,572,990
Issue date
Feb 25, 2020
NuFlare Technology, Inc.
Shusuke Yoshitake
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection method
Patent number
9,165,355
Issue date
Oct 20, 2015
NuFlare Technology, Inc.
Hideo Tsuchiya
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20200160496
Publication date
May 21, 2020
NuFlare Technology, Inc.
Takafumi INOUE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN INSPECTION APPARATUS, PATTERN POSITION MEASUREMENT APPARATU...
Publication number
20180293720
Publication date
Oct 11, 2018
NuFlare Technology, Inc.
Shusuke YOSHITAKE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION METHOD
Publication number
20150279024
Publication date
Oct 1, 2015
NuFlare Technology, Inc.
Hideo TSUCHIYA
G06 - COMPUTING CALCULATING COUNTING