Manabu NAKAGAWASAI

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature sensor, temperature measuring device, and temperature m...
- Patent number 11,867,458
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Manabu Nakagawasai
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Sputtering apparatus
- Patent number 11,608,555
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measuring mechanism, temperature measuring method, and...
- Patent number 11,605,547
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Manabu Nakagawasai
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,532,784
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage device and processing apparatus
- Patent number 11,417,504
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage device and processing apparatus
- Patent number 11,293,092
- Issue date Apr 5, 2022
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable structure and film forming apparatus
- Patent number 10,847,399
- Issue date Nov 24, 2020
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL METHOD OF SUBST...
- Publication number 20220199377
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Toshiharu HIRATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SUBSTRATE WITH SENSOR
- Publication number 20220151078
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- G01 - MEASURING TESTING
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20210285092
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE SENSOR, TEMPERATURE MEASURING DEVICE, AND TEMPERATURE M...
- Publication number 20210285718
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD OF MANUFACTURING SUBSTRATE P...
- Publication number 20210287916
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20210280777
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE STRUCTURE AND TREATMENT DEVICE
- Publication number 20200381272
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Shinji ORIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASURING MECHANISM, TEMPERATURE MEASURING METHOD, AND...
- Publication number 20200303223
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND PROCESSING APPARATUS
- Publication number 20200131625
- Publication date Apr 30, 2020
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STAGE DEVICE AND PROCESSING APPARATUS
- Publication number 20200135434
- Publication date Apr 30, 2020
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOVABLE STRUCTURE AND FILM FORMING APPARATUS
- Publication number 20180294176
- Publication date Oct 11, 2018
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Manabu NAKAGAWASAI

Person

Patents Grantslast 30 patents

Temperature sensor, temperature measuring device, and temperature m...

Sputtering apparatus

Temperature measuring mechanism, temperature measuring method, and...

Substrate processing apparatus and method

Stage device and processing apparatus

Stage device and processing apparatus

Movable structure and film forming apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL METHOD OF SUBST...

METHOD FOR MANUFACTURING SUBSTRATE WITH SENSOR

SPUTTERING APPARATUS

TEMPERATURE SENSOR, TEMPERATURE MEASURING DEVICE, AND TEMPERATURE M...

SUBSTRATE PROCESSING DEVICE AND METHOD OF MANUFACTURING SUBSTRATE P...

SUBSTRATE PROCESSING APPARATUS AND METHOD

PLACING TABLE STRUCTURE AND TREATMENT DEVICE

TEMPERATURE MEASURING MECHANISM, TEMPERATURE MEASURING METHOD, AND...

STAGE DEVICE AND PROCESSING APPARATUS

STAGE DEVICE AND PROCESSING APPARATUS

MOVABLE STRUCTURE AND FILM FORMING APPARATUS