Manabu Oie

Follow

Person

Albany, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Integration of a self-forming barrier layer and a ruthenium metal l...
- Patent number 10,157,784
- Issue date Dec 18, 2018
- Tokyo Electron Limited
- Kai-Hung Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integration of ALD barrier layer and CVD Ru liner for void-free Cu...
- Patent number 9,607,888
- Issue date Mar 28, 2017
- Tokyo Electron Limited
- Kai-Hung Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATION OF A SELF-FORMING BARRIER LAYER AND A RUTHENIUM METAL...
- Publication number 20170236752
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Kai-Hung L. Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATION OF ALD BARRIER LAYER AND CVD Ru LINER FOR VOID-FREE Cu...
- Publication number 20150221550
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Kai-Hung Yu
- H01 - BASIC ELECTRIC ELEMENTS