Manabu OKUTANI

Person

KYOTO-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,042,813
- Issue date Jul 23, 2024
- SCREEN Holdings Co., Ltd.
- Hiroshi Abe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 12,046,465
- Issue date Jul 23, 2024
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 11,901,173
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,676,834
- Issue date Jun 13, 2023
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 11,524,314
- Issue date Dec 13, 2022
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, and substrate processing method
- Patent number 11,469,117
- Issue date Oct 11, 2022
- SCREEN Holdings Co. Ltd.
- Yasunori Kanematsu
- B08 - CLEANING
Information Patent Grant
Substrate treatment apparatus
- Patent number 11,465,167
- Issue date Oct 11, 2022
- SCREEN Holdings Co., Ltd.
- Hiroshi Abe
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,404,292
- Issue date Aug 2, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing meihod
- Patent number 11,335,587
- Issue date May 17, 2022
- SCREEN Holdings Co., Ltd.
- Takashi Ota
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,302,525
- Issue date Apr 12, 2022
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- B08 - CLEANING
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 11,289,324
- Issue date Mar 29, 2022
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,260,431
- Issue date Mar 1, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 11,217,441
- Issue date Jan 4, 2022
- SCREEN Holdings Co., Ltd.
- Kenji Kobayashi
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,211,241
- Issue date Dec 28, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,177,124
- Issue date Nov 16, 2021
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,152,204
- Issue date Oct 19, 2021
- SCREEN Holdings Co., Ltd.
- Hitoshi Nakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,139,180
- Issue date Oct 5, 2021
- SCREEN Holdings Co., Ltd.
- Naohiko Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,101,147
- Issue date Aug 24, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 10,964,526
- Issue date Mar 30, 2021
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying method and substrate processing apparatus
- Patent number 10,921,057
- Issue date Feb 16, 2021
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,825,713
- Issue date Nov 3, 2020
- SCREEN Holdings Co., Ltd.
- Naohiko Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,792,712
- Issue date Oct 6, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate drying method and substrate processing apparatus
- Patent number 10,760,852
- Issue date Sep 1, 2020
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 10,755,916
- Issue date Aug 25, 2020
- SCREEN Holdings Co., Ltd.
- Hiroshi Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,734,271
- Issue date Aug 4, 2020
- SCREEN Holdings Co., Ltd.
- Takashi Ota
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,695,792
- Issue date Jun 30, 2020
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,527,348
- Issue date Jan 7, 2020
- SCREEN Holdings Co., Ltd.
- Naohiko Yoshihara
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,475,670
- Issue date Nov 12, 2019
- SCREEN Holdings Co., Ltd.
- Naohiko Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 10,249,487
- Issue date Apr 2, 2019
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sacrificial-film removal method and substrate processing device
- Patent number 9,852,914
- Issue date Dec 26, 2017
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240261814
- Publication date Aug 8, 2024
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220331845
- Publication date Oct 20, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220189762
- Publication date Jun 16, 2022
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20220172942
- Publication date Jun 2, 2022
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220076941
- Publication date Mar 10, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210331192
- Publication date Oct 28, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210197224
- Publication date Jul 1, 2021
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20210031228
- Publication date Feb 4, 2021
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20200398302
- Publication date Dec 24, 2020
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200384510
- Publication date Dec 10, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200381246
- Publication date Dec 3, 2020
- SCREEN Holdings Co., Ltd.
- Hitoshi NAKAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200294843
- Publication date Sep 17, 2020
- SCREEN Holdings Co., Ltd.
- Takashi OTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200243350
- Publication date Jul 30, 2020
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
- Publication number 20200126822
- Publication date Apr 23, 2020
- SCREEN Holdings Co., Ltd.
- Yasunori KANEMATSU
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200035514
- Publication date Jan 30, 2020
- SCREEN Holdings Co., Ltd.
- Naohiko YOSHIHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20190385835
- Publication date Dec 19, 2019
- SCREEN Holdings Co., Ltd.
- Kenji KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190371599
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190366394
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190237322
- Publication date Aug 1, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190176179
- Publication date Jun 13, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20190172703
- Publication date Jun 6, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190172733
- Publication date Jun 6, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20190096705
- Publication date Mar 28, 2019
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190091736
- Publication date Mar 28, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190063834
- Publication date Feb 28, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190063833
- Publication date Feb 28, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180308715
- Publication date Oct 25, 2018
- SCREEN Holdings Co., Ltd.
- Naohiko YOSHIHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20180272376
- Publication date Sep 27, 2018
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180193886
- Publication date Jul 12, 2018
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180087836
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Naohiko YOSHIHARA
- F26 - DRYING

Manabu OKUTANI

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate treatment method and substrate treatment apparatus

Substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing device

Substrate processing apparatus, and substrate processing method

Substrate treatment apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing meihod

Substrate processing method and substrate processing apparatus

Substrate treatment method and substrate treatment apparatus

Substrate processing method and substrate processing apparatus

Substrate treatment method and substrate treatment apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing method

Substrate drying method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate drying method and substrate processing apparatus

Substrate treatment method and substrate treatment apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method

Sacrificial-film removal method and substrate processing device

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS