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Manabu Saeda
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Moriyama, JP
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last 30 patents
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Patent Grant
Non-plasma cleaning method for semiconductor manufacturing apparatus
Patent number
5,421,902
Issue date
Jun 6, 1995
Iwatani Sangyo Kabushiki Kaisha (Iwatani International Corp)
Hideki Odajima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...