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Manabu Saitou
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Hitachi, JP
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Patents Grants
last 30 patents
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Patent Grant
Photosensitive element, method for formation of resist pattern, and...
Patent number
8,501,392
Issue date
Aug 6, 2013
Hitachi Chemical Company, Ltd.
Manabu Saitou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PHOTOSENSITIVE ELEMENT, METHOD FOR FORMATION OF RESIST PATTERN, AND...
Publication number
20090297982
Publication date
Dec 3, 2009
Manabu Saitou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Negative photosensitive resin composition and negative photosensiti...
Publication number
20060177762
Publication date
Aug 10, 2006
Naoki Yamada
G02 - OPTICS