Manabu Sato

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Boise, ID, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma etching method
- Patent number 8,303,834
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and computer readable storage medium
- Patent number 8,241,514
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD AND COMPUTER READABLE STORAGE MEDIUM
- Publication number 20090242516
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20090242515
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS