Manabu Shimada

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Hiroshima-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Particle removal method for a substrate transfer mechanism and appa...
- Patent number 7,748,138
- Issue date Jul 6, 2010
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aerosol particle charging device
- Patent number 7,522,703
- Issue date Apr 21, 2009
- Kanomax Japan Incorporated
- Kikuo Okuyama
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Processing apparatus and method for removing particles therefrom
- Patent number 7,347,006
- Issue date Mar 25, 2008
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing particles from surface of article
- Patent number 6,391,118
- Issue date May 21, 2002
- Ebara Corporation
- Toshiaki Fujii
- B08 - CLEANING
Information Patent Grant
Method for removing particles from a surface of an article
- Patent number 6,240,931
- Issue date Jun 5, 2001
- Ebara Corporation
- Toshiaki Fujii
- B08 - CLEANING
Information Patent Grant
Method and apparatus for removing particles from surface of article
- Patent number 6,205,676
- Issue date Mar 27, 2001
- Ebara Corporation
- Toshiaki Fujii
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Aerosol particle charging equipment
- Publication number 20060108537
- Publication date May 25, 2006
- Kikuo Okuyama
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Substrate transfer mechanism and subtrate transfer apparatus includ...
- Publication number 20050252455
- Publication date Nov 17, 2005
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus and method for removing particles therefrom
- Publication number 20050189071
- Publication date Sep 1, 2005
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Aerosol particle classification apparatus
- Publication number 20050180543
- Publication date Aug 18, 2005
- Kikuo Okuyama
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for removing particles from surface of article
- Publication number 20010029964
- Publication date Oct 18, 2001
- EBARA CORPORATION
- Toshiaki Fujii
- H01 - BASIC ELECTRIC ELEMENTS