Manabu Tagami

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin film fabrication method and thin film fabrication apparatus
- Patent number 6,872,289
- Issue date Mar 29, 2005
- Anelva Corporation
- Shigeru Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film fabrication method and thin film fabrication apparatus
- Patent number 6,348,238
- Issue date Feb 19, 2002
- Anelva Corporation
- Shigeru Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing thin films by plasma-enhanced chemical vapor d...
- Patent number 5,956,616
- Issue date Sep 21, 1999
- Anelva Corporation
- Shigeru Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode unit for in-situ cleaning in thermal CVD apparatus
- Patent number 5,893,962
- Issue date Apr 13, 1999
- Anelva Corporation
- Shigeru Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus
- Patent number 5,676,758
- Issue date Oct 14, 1997
- Anelva Corporation
- Shinya Hasegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus
- Patent number 5,624,499
- Issue date Apr 29, 1997
- Anelva Corporation
- Shigeru Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Thin film fabrication method and thin film fabrication apparatus
- Publication number 20010009220
- Publication date Jul 26, 2001
- Shigeru Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...