Manabu Toguchi

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Object moving apparatus, object processing apparatus, exposure appa...
- Patent number 8,699,001
- Issue date Apr 15, 2014
- Nikon Corporation
- Yasuo Aoki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Exposure apparatus, exposure method, and producing method of microd...
- Patent number 7,864,293
- Issue date Jan 4, 2011
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure method and system
- Patent number 6,873,400
- Issue date Mar 29, 2005
- Nikon Corporation
- Masaichi Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,538,724
- Issue date Mar 25, 2003
- Nikon Corporation
- Nobutaka Fujimori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus and mask
- Patent number 6,506,544
- Issue date Jan 14, 2003
- Nikon Corporation
- Kazuhiko Hori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, exposure apparatus, and mask
- Patent number 6,204,912
- Issue date Mar 20, 2001
- Nikon Corporation
- Makoto Tsuchiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method having a positional deviat...
- Patent number 5,912,726
- Issue date Jun 15, 1999
- Nikon Corporation
- Manabu Toguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of dividing and exposing patterns
- Patent number 5,859,690
- Issue date Jan 12, 1999
- Nikon Corporation
- Manabu Toguchi
- G02 - OPTICS
Information Patent Grant
Method of measuring orthogonality of stage unit
- Patent number 5,532,822
- Issue date Jul 2, 1996
- Nikon Corporation
- Tadaaki Shinozaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OBJECT PROCESSING APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD...
- Publication number 20110042874
- Publication date Feb 24, 2011
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT MOVING APPARATUS, OBJECT PROCESSING APPARATUS, EXPOSURE APPA...
- Publication number 20110043784
- Publication date Feb 24, 2011
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus, Exposure Method, and Producing Method of Microd...
- Publication number 20070296936
- Publication date Dec 27, 2007
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure method and system
- Publication number 20010052966
- Publication date Dec 20, 2001
- Seiji Fujitsuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Manabu Toguchi

Person

Patents Grantslast 30 patents

Object moving apparatus, object processing apparatus, exposure appa...

Exposure apparatus, exposure method, and producing method of microd...

Scanning exposure method and system

Exposure apparatus

Exposure method and exposure apparatus and mask

Exposure method, exposure apparatus, and mask

Projection exposure apparatus and method having a positional deviat...

Method of dividing and exposing patterns

Method of measuring orthogonality of stage unit

Patents Applicationslast 30 patents

OBJECT PROCESSING APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD...

OBJECT MOVING APPARATUS, OBJECT PROCESSING APPARATUS, EXPOSURE APPA...

Exposure Apparatus, Exposure Method, and Producing Method of Microd...

Scanning exposure method and system