Manabu Tsujimura

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for polishing object
- Patent number 8,257,143
- Issue date Sep 4, 2012
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Microfluidic treatment method and device
- Patent number 7,588,671
- Issue date Sep 15, 2009
- Ebara Corporation
- Tomoyuki Morita
- G01 - MEASURING TESTING
Information Patent Grant
Method of performing electrolytic treatment on a conductive layer o...
- Patent number 7,387,717
- Issue date Jun 17, 2008
- Ebara Corporation
- Junji Kunisawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,361,076
- Issue date Apr 22, 2008
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,234,999
- Issue date Jun 26, 2007
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 7,207,864
- Issue date Apr 24, 2007
- Ebara Corporation
- Kenji Kamimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 7,198,552
- Issue date Apr 3, 2007
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,150,673
- Issue date Dec 19, 2006
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 7,101,255
- Issue date Sep 5, 2006
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 7,040,968
- Issue date May 9, 2006
- Ebara Corporation
- Kenji Kamimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and a method of polishing and cleaning and dryi...
- Patent number 6,997,782
- Issue date Feb 14, 2006
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for dry-in, dry-out polishing and washing of a...
- Patent number 6,966,821
- Issue date Nov 22, 2005
- Kabushiki Kaisha Toshiba
- Katsuya Okumura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number RE38878
- Issue date Nov 15, 2005
- Ebara Corporation
- Masayoshi Hirose
- 451 - Abrading
Information Patent Grant
Polishing apparatus
- Patent number 6,939,208
- Issue date Sep 6, 2005
- Ebara Corporation
- Kenji Kamimura
- B24 - GRINDING POLISHING
Information Patent Grant
Electroless Ni-B plating liquid, electronic device and method for m...
- Patent number 6,936,302
- Issue date Aug 30, 2005
- Ebara Corporation
- Hiroaki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate plating apparatus
- Patent number 6,929,722
- Issue date Aug 16, 2005
- Ebara Corporation
- Akihisa Hongo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus
- Patent number 6,918,814
- Issue date Jul 19, 2005
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,843,706
- Issue date Jan 18, 2005
- Ebara Corporation
- Manabu Tsujimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with air exhaust system
- Patent number 6,783,427
- Issue date Aug 31, 2004
- Ebara Corporation
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Grant
Electroless Ni—B plating liquid, electronic device and meth...
- Patent number 6,706,422
- Issue date Mar 16, 2004
- Ebara Corporation
- Hiroaki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus
- Patent number 6,632,335
- Issue date Oct 14, 2003
- Ebara Corporation
- Junji Kunisawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polishing apparatus
- Patent number 6,626,736
- Issue date Sep 30, 2003
- Ebara Corporation
- Manabu Tsujimura
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for dry-in, dry-out polishing and washing of a...
- Patent number 6,547,638
- Issue date Apr 15, 2003
- Ebara Corporation
- Katsuya Okumura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and method
- Patent number 6,500,051
- Issue date Dec 31, 2002
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for dry-in, dry-out polishing and washing of a...
- Patent number 6,443,808
- Issue date Sep 3, 2002
- Kabushiki Kaisha Toshiba
- Katsuya Okumura
- B08 - CLEANING
Information Patent Grant
Method and apparatus for dry-in, dry-out polishing and washing of a...
- Patent number 6,439,971
- Issue date Aug 27, 2002
- Kabushiki Kaisha Toshiba
- Katsuya Okumura
- B08 - CLEANING
Information Patent Grant
Workpiece polishing apparatus comprising a fluid pressure bag provi...
- Patent number 6,435,949
- Issue date Aug 20, 2002
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for dry-in, dry-out polishing and washing of a...
- Patent number 6,425,806
- Issue date Jul 30, 2002
- Kabushiki Kaisha Toshiba
- Katsuya Okumura
- B08 - CLEANING
Information Patent Grant
Polishing apparatus
- Patent number 6,413,146
- Issue date Jul 2, 2002
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing solution feeder
- Patent number 6,406,364
- Issue date Jun 18, 2002
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
- Publication number 20250118604
- Publication date Apr 10, 2025
- EBARA CORPORATION
- Akira FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
- Publication number 20240087963
- Publication date Mar 14, 2024
- EBARA CORPORATION
- Akira FUKUNAGA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
- Publication number 20210166967
- Publication date Jun 3, 2021
- EBARA CORPORATION
- Akira FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for polishing object
- Publication number 20090209176
- Publication date Aug 20, 2009
- EBARA CORPORATION
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Application
PLATING APPARATUS
- Publication number 20080296165
- Publication date Dec 4, 2008
- Junji Kunisawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Submerged Electrode and Material Thereof
- Publication number 20080271911
- Publication date Nov 6, 2008
- EBARA CORPORATION
- Naoaki Ogure
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
PLATING APPARATUS
- Publication number 20080251385
- Publication date Oct 16, 2008
- Junji Kunisawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for dry-in, dry-out polishing and washing of a...
- Publication number 20080090501
- Publication date Apr 17, 2008
- Katsuya Okumura
- B08 - CLEANING
Information Patent Application
Polishing Apparatus and Polishing Method
- Publication number 20070254558
- Publication date Nov 1, 2007
- Masako Kodera
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing apparatus
- Publication number 20070243797
- Publication date Oct 18, 2007
- Akira Fukunaga
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing apparatus
- Publication number 20070232203
- Publication date Oct 4, 2007
- Akira Fukuda
- B08 - CLEANING
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20070224916
- Publication date Sep 27, 2007
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20070205112
- Publication date Sep 6, 2007
- Masako Kodera
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Polishing method, polishing apparatus, and electrolytic polishing a...
- Publication number 20070099426
- Publication date May 3, 2007
- Manabu Tsujimura
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20070061036
- Publication date Mar 15, 2007
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20070020918
- Publication date Jan 25, 2007
- EBARA CORPORATION
- Kazuto Hirokawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Polishing apparatus
- Publication number 20060194521
- Publication date Aug 31, 2006
- Kenji Kamimura
- B24 - GRINDING POLISHING
Information Patent Application
Polishing tool and polishing apparatus
- Publication number 20060172665
- Publication date Aug 3, 2006
- Katsuya Okumura
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for forming interconnects
- Publication number 20060086618
- Publication date Apr 27, 2006
- Akira Fukunaga
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Polishing apparatus
- Publication number 20060084369
- Publication date Apr 20, 2006
- Toyomi Nishi
- B08 - CLEANING
Information Patent Application
Method and apparatus for dry-in, dry-out polishing and washing of a...
- Publication number 20060009130
- Publication date Jan 12, 2006
- Katsuya Okumura
- B08 - CLEANING
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20060009127
- Publication date Jan 12, 2006
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Method of and apparatus for manufacturing semiconductor device
- Publication number 20060003521
- Publication date Jan 5, 2006
- Akira Fukunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interconnects forming method and interconnects forming apparatus
- Publication number 20050282378
- Publication date Dec 22, 2005
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for inspecting pattern on object
- Publication number 20050244049
- Publication date Nov 3, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Hiroyuki Onishi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Polishing apparatus
- Publication number 20050227596
- Publication date Oct 13, 2005
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20050191949
- Publication date Sep 1, 2005
- Kenji Kamimura
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing method and apparatus
- Publication number 20050191858
- Publication date Sep 1, 2005
- Akira Fukunaga
- B24 - GRINDING POLISHING
Information Patent Application
Microfluidic treatment method and device
- Publication number 20050161326
- Publication date Jul 28, 2005
- Tomoyuki Morita
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method of and apparatus for manufacturing semiconductor device
- Publication number 20040248405
- Publication date Dec 9, 2004
- Akira Fukunaga
- H01 - BASIC ELECTRIC ELEMENTS

Manabu Tsujimura

Person

Patents Grantslast 30 patents

Method and apparatus for polishing object

Microfluidic treatment method and device

Method of performing electrolytic treatment on a conductive layer o...

Method for estimating polishing profile or polishing amount, polish...

Method for estimating polishing profile or polishing amount, polish...

Polishing apparatus

Polishing apparatus

Method for estimating polishing profile or polishing amount, polish...

Polishing apparatus

Polishing apparatus

Polishing apparatus and a method of polishing and cleaning and dryi...

Method and apparatus for dry-in, dry-out polishing and washing of a...

Polishing apparatus

Polishing apparatus

Electroless Ni-B plating liquid, electronic device and method for m...

Substrate plating apparatus

Polishing apparatus

Polishing apparatus

Polishing system with air exhaust system

Electroless Ni&#x02014;B plating liquid, electronic device and meth...

Plating apparatus

Polishing apparatus

Method and apparatus for dry-in, dry-out polishing and washing of a...

Polishing apparatus and method

Method and apparatus for dry-in, dry-out polishing and washing of a...

Method and apparatus for dry-in, dry-out polishing and washing of a...

Workpiece polishing apparatus comprising a fluid pressure bag provi...

Method and apparatus for dry-in, dry-out polishing and washing of a...

Polishing apparatus

Polishing solution feeder

Patents Applicationslast 30 patents

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

Method and apparatus for polishing object

PLATING APPARATUS

Submerged Electrode and Material Thereof

PLATING APPARATUS

Method and apparatus for dry-in, dry-out polishing and washing of a...

Polishing Apparatus and Polishing Method

Polishing method and polishing apparatus

Polishing method and polishing apparatus

Method for estimating polishing profile or polishing amount, polish...

Polishing apparatus and polishing method

Polishing method, polishing apparatus, and electrolytic polishing a...

Method for estimating polishing profile or polishing amount, polish...

Substrate processing method and substrate processing apparatus

Polishing apparatus

Polishing tool and polishing apparatus

Method and apparatus for forming interconnects

Polishing apparatus

Method and apparatus for dry-in, dry-out polishing and washing of a...

Method for estimating polishing profile or polishing amount, polish...

Method of and apparatus for manufacturing semiconductor device

Interconnects forming method and interconnects forming apparatus

Apparatus and method for inspecting pattern on object

Polishing apparatus

Polishing apparatus

Substrate processing method and apparatus

Microfluidic treatment method and device

Method of and apparatus for manufacturing semiconductor device

Electroless Ni—B plating liquid, electronic device and meth...