TREA

Manabu Yano

Follow

Person

  • Hitachiohmiya, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Beam irradiation device
    • Patent number 11,239,042
    • Issue date Feb 1, 2022
    • HITACHI HIGH-TECH CORPORATION
    • Akira Ikegami
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Beam irradiation device
    • Patent number 10,832,886
    • Issue date Nov 10, 2020
    • HITACHI HIGH-TECH CORPORATION
    • Akira Ikegami
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Charged particle beam device
    • Patent number 10,304,654
    • Issue date May 28, 2019
    • Hitachi High-Technologies Corporation
    • Akira Ikegami
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Shape measurement method, and system therefor
    • Patent number 9,354,049
    • Issue date May 31, 2016
    • HUTACHI HIGH-TECHNOLOGIES CORPORATION
    • Chie Shishido
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Charged-particle microscope
    • Patent number 8,859,962
    • Issue date Oct 14, 2014
    • Hitachi High-Technologies Corporation
    • Noritsugu Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Scanning electron microscope
    • Patent number 8,487,253
    • Issue date Jul 16, 2013
    • Hitachi High-Technologies Corporation
    • Minoru Yamazaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Charged particle beam apparatus
    • Patent number 8,334,520
    • Issue date Dec 18, 2012
    • Hitachi High-Technologies Corporation
    • Tadashi Otaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Scanning electron microscope
    • Patent number 8,080,790
    • Issue date Dec 20, 2011
    • Hitachi High-Technologies Corporation
    • Minoru Yamazaki
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Beam Irradiation Device
    • Publication number 20210027976
    • Publication date Jan 28, 2021
    • HITACHI HIGH-TECH CORPORATION
    • Akira IKEGAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Beam Irradiation Device
    • Publication number 20190287754
    • Publication date Sep 19, 2019
    • Hitachi High-Technologies Corporation
    • Akira IKEGAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Charged Particle Beam Device
    • Publication number 20180233320
    • Publication date Aug 16, 2018
    • Hitachi High-Technologies Corporation
    • Akira IKEGAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CHARGED-PARTICLE MICROSCOPE
    • Publication number 20140197313
    • Publication date Jul 17, 2014
    • Hitachi High-Technologies Corporation
    • Noritsugu Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHAPE MEASUREMENT METHOD, AND SYSTEM THEREFOR
    • Publication number 20130262027
    • Publication date Oct 3, 2013
    • Chie Shishido
    • G01 - MEASURING TESTING
  • Information Patent Application

    CHARGED-PARTICLE MICROSCOPE
    • Publication number 20120119087
    • Publication date May 17, 2012
    • Hitachi High-Technologies Corporation
    • Noritsugu Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SCANNING ELECTRON MICROSCOPE
    • Publication number 20120061566
    • Publication date Mar 15, 2012
    • Hitachi High-Technologies Corporation
    • Minoru YAMAZAKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CHARGED PARTICLE BEAM APPARATUS
    • Publication number 20110260057
    • Publication date Oct 27, 2011
    • Tadashi Otaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SCANNING ELECTRON MICROSCOPE
    • Publication number 20090224170
    • Publication date Sep 10, 2009
    • Minoru YAMAZAKI
    • H01 - BASIC ELECTRIC ELEMENTS