Manao Hoshina

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate holding apparatus, substrate processing apparatus having...
- Patent number 12,002,704
- Issue date Jun 4, 2024
- Ebara Corporation
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus
- Patent number 11,865,665
- Issue date Jan 9, 2024
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,697,184
- Issue date Jul 11, 2023
- Ebara Corporation
- Makoto Kashiwagi
- B24 - GRINDING POLISHING
Information Patent Grant
Laminated membrane, substrate holder including laminated membrane,...
- Patent number 11,638,980
- Issue date May 2, 2023
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Top ring for holding a substrate and substrate processing apparatus
- Patent number 11,400,561
- Issue date Aug 2, 2022
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 11,331,768
- Issue date May 17, 2022
- Ebara Corporation
- Makoto Kashiwagi
- B24 - GRINDING POLISHING
Information Patent Grant
Jig for a polishing apparatus
- Patent number 11,305,399
- Issue date Apr 19, 2022
- Ebara Corporation
- Kenichi Kobayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate holding parts
- Patent number D890824
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding parts
- Patent number D890825
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding parts
- Patent number D890823
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding parts
- Patent number D890822
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Reversing machine and substrate polishing apparatus
- Patent number 10,525,564
- Issue date Jan 7, 2020
- Ebara Corporation
- Kenichi Akazawa
- B08 - CLEANING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,414,013
- Issue date Sep 17, 2019
- Ebara Corporation
- Masaya Seki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 10,144,103
- Issue date Dec 4, 2018
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate gripping apparatus
- Patent number 9,892,953
- Issue date Feb 13, 2018
- Ebara Corporation
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate gripping apparatus
- Patent number 9,269,605
- Issue date Feb 23, 2016
- Ebara Corporation
- Mitsuru Miyazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20240282619
- Publication date Aug 22, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20240091899
- Publication date Mar 21, 2024
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B24 - GRINDING POLISHING
Information Patent Application
LAMINATED MEMBRANE, SUBSTRATE HOLDER INCLUDING LAMINATED MEMBRANE,...
- Publication number 20200316747
- Publication date Oct 8, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200246939
- Publication date Aug 6, 2020
- EBARA CORPORATION
- Makoto Kashiwagi
- B24 - GRINDING POLISHING
Information Patent Application
TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200039024
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
JIG FOR A POLISHING APPARATUS
- Publication number 20200039025
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20190184519
- Publication date Jun 20, 2019
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20190131166
- Publication date May 2, 2019
- EBARA CORPORATION
- Makoto KASHIWAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20190118335
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20190054589
- Publication date Feb 21, 2019
- EBARA CORPORATION
- Masaya SEKI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20170165804
- Publication date Jun 15, 2017
- EBARA CORPORATION
- Masaya SEKI
- B24 - GRINDING POLISHING
Information Patent Application
REVERSING MACHINE AND SUBSTRATE POLISHING APPARATUS
- Publication number 20170072531
- Publication date Mar 16, 2017
- EBARA CORPORATION
- Kenichi Akazawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE GRIPPING APPARATUS
- Publication number 20160133503
- Publication date May 12, 2016
- EBARA CORPORATION
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE GRIPPING APPARATUS
- Publication number 20140197610
- Publication date Jul 17, 2014
- EBARA CORPORATION
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS

Manao Hoshina

Person

Patents Grantslast 30 patents

Substrate holding apparatus, substrate processing apparatus having...

Polishing apparatus

Substrate processing apparatus and substrate processing method

Laminated membrane, substrate holder including laminated membrane,...

Top ring for holding a substrate and substrate processing apparatus

Polishing head and polishing apparatus

Jig for a polishing apparatus

Substrate holding parts

Substrate holding parts

Substrate holding parts

Substrate holding parts

Reversing machine and substrate polishing apparatus

Polishing method and polishing apparatus

Polishing apparatus and polishing method

Substrate gripping apparatus

Substrate gripping apparatus

Patents Applicationslast 30 patents

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...

POLISHING APPARATUS

LAMINATED MEMBRANE, SUBSTRATE HOLDER INCLUDING LAMINATED MEMBRANE,...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

JIG FOR A POLISHING APPARATUS

POLISHING HEAD AND POLISHING APPARATUS

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...

POLISHING APPARATUS

POLISHING METHOD AND POLISHING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

REVERSING MACHINE AND SUBSTRATE POLISHING APPARATUS

SUBSTRATE GRIPPING APPARATUS

SUBSTRATE GRIPPING APPARATUS