Manchao Xiao

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Functionalized cyclosilazanes as precursors for high growth rate si...
- Patent number 12,057,310
- Issue date Aug 6, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 12,049,695
- Issue date Jul 30, 2024
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-functionalized cyclic oligosiloxanes for deposition of...
- Patent number 12,018,040
- Issue date Jun 25, 2024
- VERSUM MATERIALS US, LLC
- Matthew R. Macdonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-functionalized linear and cyclic oligosiloxanes for dep...
- Patent number 11,952,465
- Issue date Apr 9, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing silicon-containing films
- Patent number 11,851,756
- Issue date Dec 26, 2023
- VERSUM MATERIALS US, LLC
- Ming Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and flowable CVD methods for making low-k films to fill...
- Patent number 11,735,413
- Issue date Aug 22, 2023
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and processes for depositing carbon-doped silicon-cont...
- Patent number 11,725,111
- Issue date Aug 15, 2023
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stable alkenyl or alkynyl-containing organosilicon precursor compos...
- Patent number 11,713,328
- Issue date Aug 1, 2023
- VERSUM MATERIALS US, LLC
- Robert G. Ridgeway
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Organoamino-polysiloxanes for deposition of silicon-containing films
- Patent number 11,591,692
- Issue date Feb 28, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for the deposition of silicon oxide films
- Patent number 11,584,854
- Issue date Feb 21, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and flowable CVD methods for making low-k films to fill...
- Patent number 11,270,880
- Issue date Mar 8, 2022
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Functionalized cyclosilazanes as precursors for high growth rate si...
- Patent number 11,177,127
- Issue date Nov 16, 2021
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bisaminoalkoxysilane compounds and methods for using same to deposi...
- Patent number 11,142,658
- Issue date Oct 12, 2021
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 11,139,162
- Issue date Oct 5, 2021
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organoamino-functionalized cyclic oligosiloxanes for deposition of...
- Patent number 11,098,069
- Issue date Aug 24, 2021
- VERSUM MATERIALS US, LLC
- Matthew R. MacDonald
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Silyl substituted organoamines as precursors for high growth rate s...
- Patent number 11,049,714
- Issue date Jun 29, 2021
- VERSUM MATERIALS US, LLC
- Matthew R. MacDonald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silacycloalkane compounds and methods for depositing silicon contai...
- Patent number 11,043,374
- Issue date Jun 22, 2021
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and methods for depositing silicon nitride films
- Patent number 11,035,039
- Issue date Jun 15, 2021
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and flowable CVD methods for making low-K films to fill...
- Patent number 11,017,998
- Issue date May 25, 2021
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
High temperature atomic layer deposition of silicon oxide thin films
- Patent number 10,991,571
- Issue date Apr 27, 2021
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkoxysilylamine compounds and applications thereof
- Patent number 10,899,500
- Issue date Jan 26, 2021
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Organoamino-functionalized linear and cyclic oligosiloxanes for dep...
- Patent number 10,822,458
- Issue date Nov 3, 2020
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for the deposition of silicon oxide films
- Patent number 10,703,915
- Issue date Jul 7, 2020
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Carbon bridged aminosilane compounds for high growth rate silicon-c...
- Patent number 10,464,953
- Issue date Nov 5, 2019
- VERSUM MATERIALS US, LLC
- Meiliang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and flowable CVD methods for making low-K films to fill...
- Patent number 10,468,244
- Issue date Nov 5, 2019
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 10,460,929
- Issue date Oct 29, 2019
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 10,453,675
- Issue date Oct 22, 2019
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Bisaminoalkoxysilane compounds and methods for using same to deposi...
- Patent number 10,421,766
- Issue date Sep 24, 2019
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon-based films and methods of forming the same
- Patent number 10,422,034
- Issue date Sep 24, 2019
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 10,316,407
- Issue date Jun 11, 2019
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...
- Publication number 20240395541
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20240392434
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- JIANHENG LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Organoamino-Functionalized Linear and Cyclic Oligosiloxanes for Dep...
- Publication number 20240287257
- Publication date Aug 29, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
New Precursors For Depositing Films With High Elastic Modulus
- Publication number 20240240309
- Publication date Jul 18, 2024
- VERSUM MATERIALS US, LLC
- WILLIAM ROBERT ENTLEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS
- Publication number 20240093366
- Publication date Mar 21, 2024
- VERSUM MATERIALS US, LLC
- MING LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...
- Publication number 20240093360
- Publication date Mar 21, 2024
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOALKOXYSILANES AND DIALKOXYSILANES AND DENSE ORGANOSILICA FILMS...
- Publication number 20240052490
- Publication date Feb 15, 2024
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYDISILOXANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
- Publication number 20230386825
- Publication date Nov 30, 2023
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...
- Publication number 20230348736
- Publication date Nov 2, 2023
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C07 - ORGANIC CHEMISTRY
Information Patent Application
STABLE ALKENYL OR ALKYNYL-CONTAINING ORGANOSILICON PRECURSOR COMPOS...
- Publication number 20230339986
- Publication date Oct 26, 2023
- VERSUM MATERIALS US, LLC
- ROBERT G. RIDGEWAY
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COMPOSITIONS ND METHODS USING SAME FOR GERMANIUM SEED LAYER
- Publication number 20230287562
- Publication date Sep 14, 2023
- VERSUM MATERIALS US, LLC
- MATTHEW R. MACDONALD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLOSILOXANES AND FILMS MADE THEREWITH
- Publication number 20230279030
- Publication date Sep 7, 2023
- VERSUM MATERIALS US, LLC
- FORREST GLENN BROWN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR SILICON CONTAINING FILMS
- Publication number 20230183272
- Publication date Jun 15, 2023
- VERSUM MATERIALS US, LLC
- XINJIAN LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINO-POLISILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20230167549
- Publication date Jun 1, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon Compounds And Methods For Depositing Films Using Same
- Publication number 20230123377
- Publication date Apr 20, 2023
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEW PRECURSORS FOR DEPOSITING FILMS WITH ELASTIC MODULUS
- Publication number 20230103933
- Publication date Apr 6, 2023
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR DEPOSITING A FILM
- Publication number 20230058258
- Publication date Feb 23, 2023
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS FOR DEPOSITING FILMS WITH HIGH ELASTIC MODULUS
- Publication number 20220388033
- Publication date Dec 8, 2022
- VERSUM MATERIALS US, LLC
- ROBERT GORDON RIDGEWAY
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MONOALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
- Publication number 20220301862
- Publication date Sep 22, 2022
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS COMPRISING SILACYCLOALKANES AND METHODS USING SAME FOR...
- Publication number 20220267642
- Publication date Aug 25, 2022
- VERSUM MATERIALS US, LLC
- RAYMOND N. VRTIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOSILICON PRECURSORS FOR DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20220234903
- Publication date Jul 28, 2022
- VERSUM MATERIALS US, LLC
- RONALD M. PEARLSTEIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors and Flowable CVD Methods for Making Low-K Films to Fill...
- Publication number 20220157601
- Publication date May 19, 2022
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF...
- Publication number 20220081453
- Publication date Mar 17, 2022
- VERSUM MATERIALS US, LLC
- MATTHEW R. MACDONALD
- C07 - ORGANIC CHEMISTRY
Information Patent Application
FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...
- Publication number 20220044929
- Publication date Feb 10, 2022
- VERSUM PATENTS US, LLC
- MANCHAO XIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...
- Publication number 20220041870
- Publication date Feb 10, 2022
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...
- Publication number 20210407793
- Publication date Dec 30, 2021
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20210140040
- Publication date May 13, 2021
- VERSUM MATERIALS US, LLC
- JIANHENG LI
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Precursors and Flowable CVD Methods for Making Low-K Films to Fill...
- Publication number 20210043446
- Publication date Feb 11, 2021
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Dep...
- Publication number 20210017339
- Publication date Jan 21, 2021
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Compositions And Methods For The Deposition Of Silicon Oxide Films
- Publication number 20200308416
- Publication date Oct 1, 2020
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C01 - INORGANIC CHEMISTRY

Manchao Xiao

Person

Patents Grantslast 30 patents

Functionalized cyclosilazanes as precursors for high growth rate si...

Compositions and methods using same for deposition of silicon-conta...

Organoamino-functionalized cyclic oligosiloxanes for deposition of...

Organoamino-functionalized linear and cyclic oligosiloxanes for dep...

Methods for depositing silicon-containing films

Precursors and flowable CVD methods for making low-k films to fill...

Compositions and processes for depositing carbon-doped silicon-cont...

Stable alkenyl or alkynyl-containing organosilicon precursor compos...

Organoamino-polysiloxanes for deposition of silicon-containing films

Compositions and methods for the deposition of silicon oxide films

Precursors and flowable CVD methods for making low-k films to fill...

Functionalized cyclosilazanes as precursors for high growth rate si...

Bisaminoalkoxysilane compounds and methods for using same to deposi...

Organoaminosilane precursors and methods for depositing films compr...

Organoamino-functionalized cyclic oligosiloxanes for deposition of...

Silyl substituted organoamines as precursors for high growth rate s...

Silacycloalkane compounds and methods for depositing silicon contai...

Compositions and methods for depositing silicon nitride films

Precursors and flowable CVD methods for making low-K films to fill...

High temperature atomic layer deposition of silicon oxide thin films

Alkoxysilylamine compounds and applications thereof

Organoamino-functionalized linear and cyclic oligosiloxanes for dep...

Compositions and methods for the deposition of silicon oxide films

Carbon bridged aminosilane compounds for high growth rate silicon-c...

Precursors and flowable CVD methods for making low-K films to fill...

Organoaminosilane precursors and methods for depositing films compr...

Organoaminosilane precursors and methods for depositing films compr...

Bisaminoalkoxysilane compounds and methods for using same to deposi...

Silicon-based films and methods of forming the same

Compositions and methods using same for deposition of silicon-conta...

Patents Applicationslast 30 patents

FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

Organoamino-Functionalized Linear and Cyclic Oligosiloxanes for Dep...

New Precursors For Depositing Films With High Elastic Modulus

COMPOSITIONS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS

COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...

MONOALKOXYSILANES AND DIALKOXYSILANES AND DENSE ORGANOSILICA FILMS...

ALKOXYDISILOXANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM

COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...

STABLE ALKENYL OR ALKYNYL-CONTAINING ORGANOSILICON PRECURSOR COMPOS...

COMPOSITIONS ND METHODS USING SAME FOR GERMANIUM SEED LAYER

CYCLOSILOXANES AND FILMS MADE THEREWITH

COMPOSITIONS AND METHODS USING SAME FOR SILICON CONTAINING FILMS

ORGANOAMINO-POLISILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS

Silicon Compounds And Methods For Depositing Films Using Same

NEW PRECURSORS FOR DEPOSITING FILMS WITH ELASTIC MODULUS

METHOD FOR DEPOSITING A FILM

PRECURSORS FOR DEPOSITING FILMS WITH HIGH ELASTIC MODULUS

MONOALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM

COMPOSITIONS COMPRISING SILACYCLOALKANES AND METHODS USING SAME FOR...

ORGANOSILICON PRECURSORS FOR DEPOSITION OF SILICON-CONTAINING FILMS

Precursors and Flowable CVD Methods for Making Low-K Films to Fill...

ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF...

FUNCTIONALIZED CYCLOSILAZANES AS PRECURSORS FOR HIGH GROWTH RATE SI...

COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...

ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

Precursors and Flowable CVD Methods for Making Low-K Films to Fill...

Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Dep...

Compositions And Methods For The Deposition Of Silicon Oxide Films