Mandeep Singh

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Delft, NL

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Patents Grantslast 30 patents

Information Patent Grant
Illumination system, lithographic apparatus, mirror, method of remo...
- Patent number 7,875,863
- Issue date Jan 25, 2011
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods to clean a surface, a device manufacturing method, a cleani...
- Patent number 7,628,865
- Issue date Dec 8, 2009
- ASML Netherlands B.V.
- Mandeep Singh
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Apparatus and method for detecting contamination within a lithograp...
- Patent number 7,473,916
- Issue date Jan 6, 2009
- ASML Netherlands B.V.
- Mandeep Singh
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus and method
- Patent number 7,473,917
- Issue date Jan 6, 2009
- ASML Netherlands B.V.
- Mandeep Singh
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
EUV MASK FOR USE DURING EUV PHOTOLITHOGRAPHY PROCESSES
- Publication number 20150140477
- Publication date May 21, 2015
- GLOBAL FOUNDRIES Inc.
- Mandeep Singh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system, lithographic apparatus, mirror, method of remo...
- Publication number 20080149854
- Publication date Jun 26, 2008
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods to clean a surface, a device manufacturing method, a cleani...
- Publication number 20070251543
- Publication date Nov 1, 2007
- ASML NETHERLANDS B.V.
- Mandeep Singh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20070139648
- Publication date Jun 21, 2007
- ASML NETHERLANDS B.V.
- Mandeep Singh
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus and method
- Publication number 20070139646
- Publication date Jun 21, 2007
- ASML NETHERLANDS B.V.
- Mandeep Singh
- G01 - MEASURING TESTING