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Manfred Blattner
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Emmendingen, DE
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last 30 patents
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Patent Grant
Supplying RF power to a plasma process
Patent number
7,981,306
Issue date
Jul 19, 2011
Huettinger Elektronik GmbH + Co. KG
Manfred Blattner
H03 - BASIC ELECTRONIC CIRCUITRY
Patents Applications
last 30 patents
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Patent Application
SUPPLYING RF POWER TO A PLASMA PROCESS
Publication number
20070044715
Publication date
Mar 1, 2007
HUETTINGER Elektronik GmbH + Co. KG
Manfred Blattner
H03 - BASIC ELECTRONIC CIRCUITRY