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Manfred Dahl
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Lauchheim, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for determining distortion and/or image surface
Patent number
7,400,388
Issue date
Jul 15, 2008
Carl Zeiss SMT AG
Wolfgang Emer
G01 - MEASURING TESTING
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Patent Grant
Method and apparatus for determining the influencing of the state o...
Patent number
7,286,245
Issue date
Oct 23, 2007
Carl Zeiss SMT AG
Ulrich Wegmann
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR DETERMINING THE INFLUENCING OF THE STATE O...
Publication number
20080037905
Publication date
Feb 14, 2008
Carl Zeiss SMT AG
Ulrich Wegmann
G02 - OPTICS
Information
Patent Application
Method for determining distortion and/or image surface
Publication number
20060007429
Publication date
Jan 12, 2006
Carl Zeiss SMT AG
Wolfgang Emer
G02 - OPTICS
Information
Patent Application
Method and apparatus for determining the influencing of the state o...
Publication number
20040114150
Publication date
Jun 17, 2004
Carl Zeiss SMT AG
Ulrich Wegmann
G02 - OPTICS