Manfred Falter

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Ulm, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for thermally treating semiconductor substrates
- Patent number 8,450,652
- Issue date May 28, 2013
- Mattson Thermal Products GmbH
- Manfred Falter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermally processing a plurality of wafer-sha...
- Patent number 7,977,258
- Issue date Jul 12, 2011
- Mattson Technology, Inc.
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for thermally treating substrates
- Patent number 6,965,093
- Issue date Nov 15, 2005
- Mattson Thermal Products GmbH
- Manfred Falter
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus For Thermally Treating Semiconductor Substrates
- Publication number 20090139977
- Publication date Jun 4, 2009
- Manfred Falter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for thermally processing a plurality of wafer-sha...
- Publication number 20080248657
- Publication date Oct 9, 2008
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for thermally treating substrates
- Publication number 20040089649
- Publication date May 13, 2004
- Manfred Falter
- H01 - BASIC ELECTRIC ELEMENTS