Manfred Schrenk

Person

  • Kahla, DE

Patents Grantslast 30 patents

  • Information Patent Grant

    Lithographic apparatus and sensor therefor

    • Patent number 8,629,418
    • Issue date Jan 14, 2014
    • ASML Netherlands B.V.
    • Marcus Adrianus Van De Kerkhof
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Sensor for use in a lithographic apparatus

    • Patent number 7,453,078
    • Issue date Nov 18, 2008
    • ASML Netherlands B.V.
    • Haico Victor Kok
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Sensor for use in a lithographic apparatus

    • Patent number 7,282,701
    • Issue date Oct 16, 2007
    • ASML Netherlands B.V.
    • Haico Victor Kok
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Partial-pressure sensor

    • Patent number 6,324,897
    • Issue date Dec 4, 2001
    • Jenoptik Aktiengesellschaft
    • Manfred Schrenk
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    Sensor for use in a lithographic apparatus

    • Publication number 20080007844
    • Publication date Jan 10, 2008
    • ASML NETHERLANDS B.V.
    • Haico Victor Kok
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Sensor for use in a lithographic apparatus

    • Publication number 20060192093
    • Publication date Aug 31, 2006
    • ASML NETHERLANDS B.V.
    • Haico Victor Kok
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY