Mankyu KANG

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Suwon-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Reticle in an apparatus for extreme ultraviolet exposure
- Patent number 11,409,193
- Issue date Aug 9, 2022
- Samsung Electronics Co., Ltd.
- Mankyu Kang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
RETICLE IN AN APPARATUS FOR EXTREME ULTRAVIOLET EXPOSURE
- Publication number 20210302825
- Publication date Sep 30, 2021
- Samsung Electronics Co., Ltd.
- Mankyu KANG
- H01 - BASIC ELECTRIC ELEMENTS