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Manuel Sohn
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Neu-Ulm, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Support structure for thermal processing systems
Patent number
12,176,241
Issue date
Dec 24, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Rapid thermal processing system with cooling system
Patent number
12,068,177
Issue date
Aug 20, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
Patent number
11,955,315
Issue date
Apr 9, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dieter Hezler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Support Structure for Thermal Processing Systems
Publication number
20250096032
Publication date
Mar 20, 2025
Mattson Technology, Inc.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Rapid Thermal Processing System With Cooling System
Publication number
20240379390
Publication date
Nov 14, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
Publication number
20240212981
Publication date
Jun 27, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dieter Hezler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Support For A Thermal Processing System
Publication number
20220205478
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Manuel Sohn
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Workpiece Processing Apparatus with Vacuum Anneal Reflector Control
Publication number
20220199376
Publication date
Jun 23, 2022
Mattson Technology, Inc.
Michael Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Gas Showerhead Assembly
Publication number
20220195601
Publication date
Jun 23, 2022
Mattson Technology, Inc.
Michael Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
Publication number
20220187021
Publication date
Jun 16, 2022
Mattson Technology, Inc.
Manuel Sohn
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
Publication number
20220189737
Publication date
Jun 16, 2022
Mattson Technology, Inc.
Dieter Hezler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Rapid Thermal Processing System With Cooling System
Publication number
20220059363
Publication date
Feb 24, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Rapid Thermal Processing System With Cooling System
Publication number
20220059371
Publication date
Feb 24, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Support Structure for Thermal Processing Systems
Publication number
20210272839
Publication date
Sep 2, 2021
Mattson Technology, Inc.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS